The ongoing development of single electron, nano and atomic scale semiconductor devices would benefit greatly from a characterization tool capable of detecting single electron charging events with high spatial resolution, at low temperature. In this work, we introduce a novel Atomic Force Microscope (AFM) instrument capable of measuring critical device dimensions, surface roughness, electrical surface potential, and ultimately the energy levels of quantum dots and single electron transistors in ultra miniaturized semiconductor devices. Characterization of nanofabricated devices with this type of instrument presents a challenge: finding the device. We therefore also present a process to efficiently find a nanometre size quantum dot buried in a 10×10mm2 silicon sample using a combination of optical positioning, capacitive sensors and AFM topography in vacuum.
@article{arxiv.2403.13935,
title = {Needle in a haystack: efficiently finding atomically defined quantum dots for electrostatic force microscopy},
author = {José Bustamante and Yoichi Miyahara and Logan Fairgrieve-Park and Kieran Spruce and Patrick See and Neil Curson and Taylor Stock and Peter Grutter},
journal= {arXiv preprint arXiv:2403.13935},
year = {2024}
}