Morphological and Structural Characterization of Cro2/Cr2o3 Films Grown by Laser-CVD

P. M. Sousa; A. J. Silvestre; N. Popovici1; O. Conde

doi:10.1016/j.apsusc.2005.01.061

Morphological and Structural Characterization of Cro2/Cr2o3 Films Grown by Laser-CVD

Materials Science 2009-11-11 v1 Other Condensed Matter

Authors: P. M. Sousa , A. J. Silvestre , N. Popovici1 , O. Conde

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Abstract

This work reports on the synthesis of chromium (III, IV) oxides films by KrF laser-assisted CVD. Films were deposited onto sapphire substrates at room temperature by photodissociation of Cr(CO)6 in dynamic atmospheres containing oxygen and argon. A study of the processing parameters has shown that partial pressure ratio of O2 to Cr(CO)6 and laser fluence are the prominent parameters that have to be accurately controlled in order to co-deposit both crystalline oxide phases. Films consistent with such a two-phase system were synthesised for a laser fluence of 75 mJ cm-2 and a partial pressure ratio about 1. PACS: 81.15.Fg, 81.15.Kk, 81.05.Je

Keywords

laser-CVD chromium oxide films morphological characterization structural characterization photodissociation two-phase system

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@article{arxiv.cond-mat/0605592,
  title  = {Morphological and Structural Characterization of Cro2/Cr2o3 Films Grown by Laser-CVD},
  author = {P. M. Sousa and A. J. Silvestre and N. Popovici1 and O. Conde},
  journal= {arXiv preprint arXiv:cond-mat/0605592},
  year   = {2009}
}

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17 pages, 4 figures

Morphological and Structural Characterization of Cro2/Cr2o3 Films Grown by Laser-CVD

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