An imaging technique is presented that enables monitoring of the wet thermal oxidation of a thin AlAs layer embedded between two distributed Bragg reflector (DBR) mirrors in a micropillar. After oxidation we confirm by white light reflection spectroscopy that high quality optical modes confined to a small volume have been formed. The combination of these two optical techniques provides a reliable and efficient way of producing oxide apertured micropillar cavities for which the wet thermal oxidation is a critical fabrication step.
@article{arxiv.1301.6248,
title = {Monitoring the formation of oxide apertures in micropillar cavities},
author = {Morten P. Bakker and Henk Snijders and Donald J. Suntrup and Tuan-Ahn Truong and Pierre M. Petroff and Martin P. van Exter and Dirk Bouwmeester},
journal= {arXiv preprint arXiv:1301.6248},
year = {2015}
}