Micro-electro-mechanical resonators employing a magnetic element have been proposed for magnetic field sensing applications, but the integration of magnetic materials with standard semiconductor compounds is challenging and requires complex fabrication protocols. We present a different approach relying on (La0.7,Sr0.3)MnO3 (LSMO), an oxide compound that works both as structural element for the resonator and functional magnetic layer. Suspended trampolines are realized in a single step process from LSMO thin films and show quality factor up to 60k and fQ products reaching 1010 Hz. Their magnetic properties are probed by a SQUID magnetometer and magnetic force microscopy, showing saturation magnetization of 240 kA/m at room temperature and in-plane magnetic domains with coercivity of 2.5 mT. Being entirely made from a magnetic material, these resonators exhibit a larger magnetic interaction volume compared to other solutions, making them ideal candidates as building blocks for high-sensitivity magnetic field sensors.
@article{arxiv.2501.12177,
title = {Magnetic Trampoline Resonators from (La,Sr)MnO3 Single-Crystal Thin Films},
author = {Nicola Manca and Dhavalkumar Mungpara and Leonélio Cichetto and Alejandro E. Plaza and Gianrico Lamura and Alexander Schwarz and Daniele Marré and Luca Pellegrino},
journal= {arXiv preprint arXiv:2501.12177},
year = {2025}
}