We present a method for the additive fabrication of planar magnetic nanoarrays with minimal surface roughness. Synthesis is accomplished by combining electron-beam lithography, used to generate nanometric patterned masks, with ion implantation in thin films. By implanting 56Fe+ ions, we are able to introduce magnetic functionality in a controlled manner into continuous Pd thin films, achieving 3D spatial resolution down to a few tens of nanometers. Our results demonstrate the application of this technique in fabricating square artificial spin ice lattices, which exhibit well-defined magnetization textures and interactions among the patterned magnetic elements.
@article{arxiv.2409.10433,
title = {Magnetic metamaterials by ion-implantation},
author = {Christina Vantaraki and Petter Ström and Tuan T. Tran and Matías P. Grassi and Giovanni Fevola and Michael Foerster and Jerzy T. Sadowski and Daniel Primetzhofer and Vassilios Kapaklis},
journal= {arXiv preprint arXiv:2409.10433},
year = {2024}
}