Low-loss integrated nanophotonic circuits with layered semiconductor materials
Abstract
Monolayer transition metal dichalcogenides with direct bandgaps are emerging candidates for microelectronics, nano-photonics, and optoelectronics. Transferred onto photonic integrated circuits (PICs), these semiconductor materials have enabled new classes of light-emitting diodes, modulators and photodetectors, that could be amenable to wafer-scale manufacturing. For integrated photonic devices, the optical losses of the PICs are critical. In contrast to silicon, silicon nitride (Si3N4) has emerged as a low-loss integrated platform with a wide transparency window from ultraviolet to mid-infrared and absence of two-photon absorption at telecommunication bands. Moreover, it is suitable for nonlinear integrated photonics due to its high Kerr nonlinearity and high-power handing capability. These features of Si3N4 are intrinsically beneficial for nanophotonics and optoelectronics applications. Here we report a low-loss integrated platform incorporating monolayer molybdenum ditelluride (1L-MoTe2) with Si3N4 photonic microresonators. We show that, with the 1L-MoTe2, microresonator quality factors exceeding 3 million in the telecommunication O-band to E-band are maintained. We further investigate the change of microresonator dispersion and resonance shift due to the presence of 1L-MoTe2, and extrapolate the optical loss introduced by 1L-MoTe2 in the telecommunication bands, out of the excitonic transition region. Our work presents a key step for low-loss, hybrid PICs with layered semiconductors without using heterogeneous wafer bonding.
Cite
@article{arxiv.2010.06014,
title = {Low-loss integrated nanophotonic circuits with layered semiconductor materials},
author = {Tianyi Liu and Ioannis Paradisanos and Jijun He and Alisson R. Cadore and Junqiu Liu and Mikhail Churaev and Rui Ning Wang and Arslan S. Raja and Clément Javerzac-Galy and Philippe Rölli and Domenico De Fazio and Barbara L. T. Rosa and Sefaattin Tongay and Giancarlo Soavi and Andrea C. Ferrari and Tobias J. Kippenberg},
journal= {arXiv preprint arXiv:2010.06014},
year = {2021}
}