Linearized and Compensated Interferometric System for High-Velocity Traceable Length Calibration on a Metre Scale
Instrumentation and Detectors
2019-05-03 v1 Applied Physics
Abstract
We report on a traceable calibration system for a 3500mm-long console that carries a measurement system for inspecting the diameter of a circular reactor chassis. The system uses two single-pass laser interferometers with homodyne fringe detection for measurement in two degrees of freedom. The hybrid FPGA-microcontroller control module carries out the fringe detection together with the application-specific scale linearization approach and the compensation of environmental influences such as thermal elongation and the refractive index of air fluctuations. We demonstrated the system feasibility with an accuracy of a few microns and translation velocity higher than 0:1 metre per second.
Cite
@article{arxiv.1905.00778,
title = {Linearized and Compensated Interferometric System for High-Velocity Traceable Length Calibration on a Metre Scale},
author = {Simon Rerucha and Bretislav Mikel and Zdenek Matej and Ondrej Herman and Miroslava Hola and Michal Jelinek and Petr Jedlicka and Ondrej Cip and Josef Lazar},
journal= {arXiv preprint arXiv:1905.00778},
year = {2019}
}
Comments
CPS 2018, Lednice, CZ, September 2018 7 pages, 8 figures