English

Initial stage of the 2D-3D transition of a strained SiGe layer on a pit-patterned Si(001) template

Materials Science 2009-11-11 v1

Abstract

We investigate the initial stage of the 2D-3D transition of strained Ge layers deposited on pit-patterned Si(001) templates. Within the pits, which assume the shape of inverted, truncated pyramids after optimized growth of a Si buffer layer, the Ge wetting layer develops a complex morphology consisting exclusively of {105} and (001) facets. These results are attributed to a strain-driven step-meandering instability on the facetted side-walls of the pits, and a step-bunching instability at the sharp concave intersections of these facets. Although both instabilities are strain-driven, their coexistence becomes mainly possible by the geometrical restrictions in the pits. It is shown that the morphological transformation of the pit surface into low-energy facets has strong influence on the preferential nucleation of Ge islands at the flat bottom of the pits.

Keywords

Cite

@article{arxiv.cond-mat/0602175,
  title  = {Initial stage of the 2D-3D transition of a strained SiGe layer on a pit-patterned Si(001) template},
  author = {Gang Chen and Herbert Lichtenberger and Guenther Bauer and Wolfgang Jantsch and Friedrich Schaffler},
  journal= {arXiv preprint arXiv:cond-mat/0602175},
  year   = {2009}
}

Comments

19 pages, 7 figures