High-precision Absolute Coordinate Measurement using Frequency Scanned Interferometry
Instrumentation and Detectors
2013-12-09 v8
Abstract
In this paper, we report high-precision absolute position measurement performed with frequency scanned interferometry (FSI). We reported previously on measurement of absolute distance with FSI [1]. Absolute position is determined by several related absolute distances measured simultaneously. The achieved precision of 2-dimensional measurements is better than 1 micron, and in 3-dimensional measurements, the precision on X and Y is confirmed to be below 1 micron, while the confirmed precision on Z is about 2 microns, where the confirmation is limited by the lower precision of the moving stage in Z direction.
Cite
@article{arxiv.1303.6477,
title = {High-precision Absolute Coordinate Measurement using Frequency Scanned Interferometry},
author = {Tianxiang Chen and Haijun Yang and Keith Riles and Cheng Li},
journal= {arXiv preprint arXiv:1303.6477},
year = {2013}
}