Growth rate and EBSD texture analysis of nitrogen doped diamond films

T. Liu; D. Raabe

Growth rate and EBSD texture analysis of nitrogen doped diamond films

Materials Science 2008-12-23 v1

Authors: T. Liu , D. Raabe

Abstract

Chemical-Vapor-Deposition (CVD) diamond films were prepared using a variation of nitrogen addition into the gas source admixture by a direct current CVD method. The influence of nitrogen addition on the crystallographic texture and grain shape evolution in heteroepitaxial polycrystalline diamond films was investigated using high-resolution electron backscattering diffraction (HR-EBSD) and X-ray diffraction (XRD). The analysis reveals that an addition of 1.5% N2 to the CH4 gas flow leads to a strong enhancement of a {110} fiber texture. The phenomenon is discussed in terms of a competitive growth selection mechanism.

Cite

@article{arxiv.0812.4025,
  title  = {Growth rate and EBSD texture analysis of nitrogen doped diamond films},
  author = {T. Liu and D. Raabe},
  journal= {arXiv preprint arXiv:0812.4025},
  year   = {2008}
}

Related papers

View all related →