Growth of flat SrRuO3(111) thin films suitable as bottom electrodes in heterostructures

D. Rubi; A. H. G. Vlooswijk; B. Noheda

doi:10.1016/j.tsf.2008.09.106

Growth of flat SrRuO3(111) thin films suitable as bottom electrodes in heterostructures

Materials Science 2009-11-13 v1

Authors: D. Rubi , A. H. G. Vlooswijk , B. Noheda

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Abstract

Thin film growth of ferroelectric or multiferroic materials on SrTiO3(111) with a buffer electrode has been hampered by the difficulty of growing flat electrodes on this polar orientation. We report on the growth and characterization of SrRuO3 thin films deposited by pulsed laser deposition on SrTiO3(111). We show that our SrRuO3(111) films are epitaxial and display magnetic bulk-like properties. Films presenting a thickness between 20 and 30nm are found to be very flat (with an RMS of about 0.5 nm) and therefore suitable as bottom electrodes in heterostructures.

Keywords

SrRuO3 thin films pulsed laser deposition bottom electrodes heterostructures epitaxial growth ferroelectric materials surface roughness

Cite

@article{arxiv.0807.1647,
  title  = {Growth of flat SrRuO3(111) thin films suitable as bottom electrodes in heterostructures},
  author = {D. Rubi and A. H. G. Vlooswijk and B. Noheda},
  journal= {arXiv preprint arXiv:0807.1647},
  year   = {2009}
}

Comments

Only PDF. 14 pages including 4 color figures

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