English

First principles band structure of interacting phosphorus and boron/aluminum $\delta$-doped layers in silicon

Materials Science 2026-02-26 v2 Mesoscale and Nanoscale Physics

Abstract

Silicon can be heavily doped with phosphorus in a single atomic layer (a δ\delta layer), significantly altering the electronic structure of the conduction bands within the material. Recent progress has also made it possible to further dope silicon with acceptor-based δ\delta layers using either boron or aluminum, making it feasible to create devices with interacting δ\delta layers with opposite polarity. Using Density Functional Theory, we calculate the electronic structure of a phosphorus-based δ\delta layer interacting with a boron or aluminum δ\delta layer, varying the distances between the δ\delta layers. At separations 1 nm and smaller, the dopant potentials overlap and largely cancel each other out, leading to an electronic structure closely mimicking intrinsic silicon. At separations greater than 1 nm, the two δ\delta layers behave independently of one another, with an equivalent electronic structure to a p-n diode with an intrinsic layer taking the place of the depletion region. One mechanism for charge transfer between δ\delta layers at larger distances could be tunneling, where we see a tunneling probability exceeding what would be seen for a standard silicon 1.1 eV triangular barrier, indicating that the interaction between delta layers may enhance tunneling compared to a traditional junction.

Keywords

Cite

@article{arxiv.2509.19205,
  title  = {First principles band structure of interacting phosphorus and boron/aluminum $\delta$-doped layers in silicon},
  author = {Quinn T. Campbell and Andrew D. Baczewski and Shashank Misra and Evan M. Anderson},
  journal= {arXiv preprint arXiv:2509.19205},
  year   = {2026}
}