Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography
Atomic Physics
2009-11-13 v1
Abstract
We present a novel method to mount and align an optical-fiber-based resonator on the flat surface of an atom chip with ultrahigh precision. The structures for mounting a pair of fibers, which constitute the fiber resonator, are produced by a spin-coated SU-8 photoresist technique by use of deep-UV lithography. The design and production of the SU-8 structures are discussed. From the measured finesses we calculate the coupling loss of the SU-8 structures acting as a kind of fiber splice to be smaller than 0.013 dB.
Keywords
Cite
@article{arxiv.physics/0608216,
title = {Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography},
author = {X. Liu and K. -H. Brenner and M. Wilzbach and M. Schwarz and T. Fernholz and J. Schmiedmayer},
journal= {arXiv preprint arXiv:physics/0608216},
year = {2009}
}
Comments
4 pages, 3 figures