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Deep Ultraviolet (DUV) Photolithography is currently used to fabricate mass-scale integrated circuits (ICs). Its high throughput and resolution could benefit large-scale RF MEMS production for the telecommunication market. We present a…
This paper reports on an approach for fabrication of micro-channels with nanometer thickness achieved by optimization of UV lithography processes. Rectangular micro-channels with a staple edge are fabricated over the surface of a silicon…
We present a simple lithographic method for fabrication of microresonator devices at the optical fiber surface. First, we undress the predetermined surface areas of a fiber segment from the polymer coating with a focused CO2 laser beam.…
We experimentally realize an optical fiber ring resonator that includes a tapered section with subwavelength-diameter waist. In this section, the guided light exhibits a significant evanescent field which allows for efficient interfacing…
3D printing of high-quality silica photonic structures is particularly challenging, as surface roughness at the nanoscale can severely degrade optical performance through scattering losses. Here, we develop a technique to fold ultrasmooth…
Efficient fiber-to-chip coupling has been a major hurdle to cost-effective packaging and scalable interconnections of photonic integrated circuits. Conventional photonic packaging methods relying on edge or grating coupling are constrained…
Integration of complex photonic structures onto optical fiber facets enables powerful platforms with unprecedented optical functionalities. Conventional nanofabrication technologies, however, do not permit viable integration of complex…
Tapered silica fibers are often used to rapidly probe the optical properties of micro-resonators. However, their low refractive index precludes phase-matching when coupling to high-index micro-resonators, reducing efficiency. Here we…
Non-destructive characterization of multi-layered structures that can be accessed from only a single side is important for applications such as well-bore integrity inspection. Existing methods related to Synthetic Aperture Focusing…
Two-photon photopolymerization of UV curing resins is an attractive method for the fabrication of microscopic transparent objects with size in the tens of micrometers range. We have been using this method to produce three-dimensional…
Transient fully reconfigurable photonic circuits can be introduced at the optical fiber surface with subangstrom precision. A building block of these circuits, a 0.7 angstrom-precise nano-bottle resonator, is experimentally created by local…
We present a fiber-ring resonator that realizes an ultra-narrowband, high-extinction, low-loss, tunable optical filter. It consists of a pair of commercial variable ratio directional couplers that allow precise adjustment of the filter…
Meta-optics, the application of metasurfaces into optical systems, is seeing an accelerating development owing to advantages in size, weight and cost and the ability to program optical functions beyond traditional refractive optics. The…
We present a new method for nanoscale atom lithography. We propose the use of a supersonic atomic beam, which provides an extremely high-brightness and cold source of fast atoms. The atoms are to be focused onto a substrate using a thin…
Femtosecond laser writing in glass was harnessed to fabricate photonic circuits comprised of waveguides, micro-mirrors, and fiber sockets, in an optical interposer chip. The compact design enabled ultra-dense routing of 40 optical channels…
Mask-based pattern generation is a crucial step in microchip production. The next-generation extreme-ultraviolet- (EUV) lithography instruments with a wavelength of \SI{13.5}{\nano\meter} is currently under development. In principle, this…
Fast production of large area patterns with nanometre resolution is crucial for the established semiconductor industry and for enabling industrial-scale production of next-generation quantum devices. Metastable atom lithography with binary…
This paper investigates the shape reconstructions of sub-wavelength objects from near-field measurements in transverse electromagnetic scattering. This geometric inverse problem is notoriously ill-posed and challenging. We develop a novel…
Surface Nanoscale Axial Photonics (SNAP) technology has demonstrated the record subangstrom fabrication precision of optical microresonators and resonant photonic circuits at the optical fiber surface. However, fabrication errors arising…
Silicon photonic devices are poised to enter high volume markets such as data-communications, telecommunications, biological sensing, and optical phased arrays; however, permanently attaching a fiber to the photonic chip with high optical…