Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation
Plasma Physics
2025-09-08 v1
Abstract
In this paper, the discharge structure of an Ar and SF inductively coupled plasma at the low pressure is investigated by mean of a fluid simulation at the quasi cold ion approximation with the room temperature magnitude.
Keywords
Cite
@article{arxiv.2509.04728,
title = {Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation},
author = {Rui-Ji Tang and Shu-Xia Zhao and Yu Tian},
journal= {arXiv preprint arXiv:2509.04728},
year = {2025}
}
Comments
arXiv admin note: substantial text overlap with arXiv:2502.16452