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In this paper, the discharge structure of an Ar/SF6 inductively coupled plasma (ICP) at the low pressure, 10 mTorr, is investigated by the fluid simulation at the quasi-cold ions approximation, i.e., room temperature. The structure is found…

Plasma Physics · Physics 2025-02-25 Yuanhe Sun , Shuxia Zhao , Ruiji Tang , Yu Tian

Discharge structure refers to the morphology of different plasma quantities, such as electron temperature, reaction rate, plasma potential, mass flux, net charge and species density, which are determined by plasma transport mechanism and…

Plasma Physics · Physics 2021-11-09 Shu-Xia Zhao , An-Qi Tang

In this work the systematic theory of discharge structure is built for highly electronegative plasma, by means of self-consistent fluid model simulation that is based on the finite element method. The highly electronegative plasma is…

Plasma Physics · Physics 2025-04-22 Yuan-He Sun , Shu-Xia Zhao , Yu Tian

In this paper we analyze the problem of glow discharge in low pressure plasma in industrial plant, for chambers of different shapes and various working parameters, like pressure and electric potential. The model described is based upon a…

The discharge structure of inductively coupled plasma is studied via fluid simulation and analytic theory collaboration. At low pressure, the discharge is stratified by the double layer, which is modelled as dipole moment. The parabolic…

Plasma Physics · Physics 2021-11-04 Shu-Xia Zhao , An-Qi Tang

Radio-frequency-driven atmospheric pressure plasma jets (RF APPJs) play an essential role in many technological applications. This work studies the characteristics of these discharges in the so-called non-neutral regime where the…

Plasma Physics · Physics 2021-09-21 Maximilian Klich , Sebastian Wilczek , Zoltan Donko , Ralf Peter Brinkmann

The microstructure of a strongly coupled liquid undergoing a shear flow was studied experimentally. The liquid was a shear melted two-dimensional plasma crystal, i.e., a single-layer suspension of micrometer-size particles in a rf discharge…

Soft Condensed Matter · Physics 2015-06-04 V. Nosenko , A. V. Ivlev , G. E. Morfill

Nanosecond discharges are characterized by a shift in energy branching toward the excitation of electronic levels and dissociation, making them particularly attractive for plasma chemistry. Understanding the spatiotemporal structure of…

Plasma Physics · Physics 2025-02-10 Konstantinos Kourtzanidis , Svetlana M. Starikovskaia

An argon-xenon (Ar/Xe) plasma is used as a model system for complex plasmas. Based on this system, symmetric low-pressure capacitively coupled radio-frequency discharges are examined utilizing Particle-In-Cell/Monte Carlo Collisions…

Plasma Physics · Physics 2021-08-11 M. Klich , S. Wilczek , J. F. J. Janssen , R. P. Brinkmann , T. Mussenbrock , J. Trieschmann

Double-layers (DLs) were observed in the expanding region of an inductively coupled plasma with $\text{Ar}/\text{SF}\_6$ gas mixtures. No DL was observed in pure argon or $\text{SF}\_6$ fractions below few percent. They exist over a wide…

Plasma Physics · Physics 2015-04-10 N. Plihon , C. S. Corr , P. Chabert

The effect of micron-sized particles on a low-pressure capacitively-coupled rf discharge is studied both experimentally and using numerical simulations. In the laboratory experiments, microparticle clouds occupying a considerable fraction…

Plasma Physics · Physics 2017-09-27 M. Y. Pustylnik , I. L. Semenov , E. Zähringer , H. M. Thomas

We report on the first detailed analysis of large three dimensional (3D) complex plasma structures in experiments performed in pure rf and combined rf+dc discharge modes. Inductively coupled plasma (ICP) is generated by an rf coil wrapped…

Plasma Physics · Physics 2013-04-04 S. Mitic , B. A. Klumov , S. A. Khrapak , G. E. Morfill

The negative power absorption in low pressure plasmas is investigated by means of an analyical model which couples Boltzmann's equation and the quasi-stationary Maxwell's equation. Exploiting standard Hilbert space methods an explicit…

Plasma Physics · Physics 2017-01-19 Jan Trieschmann , Thomas Mussenbrock

In this work, we present the results of simulations carried out for N2-H2 capacitively coupled radio-frequency discharges, running at low pressure (0.3-0.9 mbar), low power (5-20 W), and for amounts of H2 up to 5 pct. Simulations are…

The paper provides a tutorial to the conceptual layout of a self-consistently coupled Particle-In-Cell/Test-Particle model for the kinetic simulation of sputtering transport in capacitively coupled plasmas at low gas pressures. It explains…

Plasma Physics · Physics 2017-11-27 Jan Trieschmann , Frederik Schmidt , Thomas Mussenbrock

Particle-in-cell/Monte Carlo technique is used to simulate low pressure electro-negative and electro-positive plasmas at a frequency of 10 MHz. The potential, electric field, electron and ion density, and currents flowing across the plasma…

Plasma Physics · Physics 2007-05-23 M. Ardehali

The classical (i.e. non-quantum) equilibrium statistical mechanics of a two-dimensional one-component plasma (a system of charged point-particles embedded in a neutralizing background) living on a pseudosphere (an infinite surface of…

Statistical Mechanics · Physics 2007-05-23 R. Fantoni , B. Jancovici , G. Téllez

Slow dynamics in an amorphous quasi-two-dimensional complex plasma, comprised of microparticles of two different sizes, was studied experimentally. The motion of individual particles was observed using video microscopy, and the self-part of…

The spatial structure of an ultra-low emittance electron bunch in a plasma wakefield blowout regime is studied. The full Li\'{e}nard-Wiechert potentials are considered for mutual inter-particle interactions in the framework of the…

Plasma Physics · Physics 2018-07-18 Lars Reichwein , Johannes Thomas , Alexander Pukhov

The plasma-liquid interaction is an important issue in plasma technology. The simulation of discharge in spherical bubbles in the water that produced plasma-activated water (PAW) is investigated using finite element methods (FEM) for a…

Plasma Physics · Physics 2022-08-26 Niloofar Mohammadi Nahrani , Maryam Bahreini , Saeed Hasanpour Tadi
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