Development of Textured Magnesium Oxide Templates on Amorphous Polymer Surfaces Using Ion-Beam-Assisted-Deposition

Alan J. Elliot; Ronald N. Vallejo; Rongtao Lu; Judy Z. Wu

doi:10.1143/APEX.4.065502

Development of Textured Magnesium Oxide Templates on Amorphous Polymer Surfaces Using Ion-Beam-Assisted-Deposition

Materials Science 2013-09-24 v1

Authors: Alan J. Elliot , Ronald N. Vallejo , Rongtao Lu , Judy Z. Wu

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Abstract

Biaxially textured MgO templates have been successfully fabricated on several amorphous polymer films including Kapton tapes, polyimide, Poly(methyl methacrylate) (PMMA), and photoresist films using ion-beam-assisted-deposition (IBAD). With a Y2O3 buffer layer on polymer surfaces, roughening of the polymer surfaces due to preferential ion beam sputtering can be effectively reduced to meet the surface compatibility requirement for IBAD-MgO texturing. In-plane full-width-at-half-maximum (FWHM) of ~10.7 degrees and out-of-plane FWHM ~ 3.5 degrees have been obtained on homoepitaxial MgO films grown on top of the IBAD-MgO template. This method provides a practical route for fabricating epitaxial devices on polymers needed for flexible optoelectronics.

Keywords

MgO templates ion-beam-assisted-deposition amorphous polymer biaxial texture Y2O3 buffer layer flexible optoelectronics epitaxial growth

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@article{arxiv.1309.5514,
  title  = {Development of Textured Magnesium Oxide Templates on Amorphous Polymer Surfaces Using Ion-Beam-Assisted-Deposition},
  author = {Alan J. Elliot and Ronald N. Vallejo and Rongtao Lu and Judy Z. Wu},
  journal= {arXiv preprint arXiv:1309.5514},
  year   = {2013}
}

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8 pages, 3 figures

Development of Textured Magnesium Oxide Templates on Amorphous Polymer Surfaces Using Ion-Beam-Assisted-Deposition

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