Deposition of Diamond-like Carbon films using Dense Plasma Focus

Chhaya Ravikant; P. Arun; Savita Roy; M. P. Srivastava

Deposition of Diamond-like Carbon films using Dense Plasma Focus

Materials Science 2008-11-04 v1

Authors: Chhaya Ravikant , P. Arun , Savita Roy , M. P. Srivastava

Abstract

Diamond Like Carbon (DLC) films were deposited on quartz substrates using Dense Plasma Focus (DPF) method. The formation of ${\rm sp^3}$ bonds as is it's content in the film strongly depends on the substrate and it seems quartz is not a suitable substrate. However, we report here the formation of DLC films on quartz substrates that were maintained at elevated temperatures and show the content of carbon atoms with ${\rm sp^3}$ bonds in the film is directly proportional to the substrate's temperature. Not only does this give good control of film fabrication, but also shows how to take advantage of DLC film's anti-wear, scratch resistant properties on material surfaces that require protection.

Keywords

diamond-like carbon dense plasma focus thin film deposition sp3 bonds quartz substrate temperature dependence

Cite

@article{arxiv.0811.0162,
  title  = {Deposition of Diamond-like Carbon films using Dense Plasma Focus},
  author = {Chhaya Ravikant and P. Arun and Savita Roy and M. P. Srivastava},
  journal= {arXiv preprint arXiv:0811.0162},
  year   = {2008}
}

Comments

Seven figures

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