Chip-scale nanofabrication of single spins and spin arrays in diamond

David M. Toyli; Christoph D. Weis; Gregory D. Fuchs; Thomas Schenkel; David D. Awschalom

doi:10.1021/nl102066q

Chip-scale nanofabrication of single spins and spin arrays in diamond

Mesoscale and Nanoscale Physics 2010-08-02 v2 Materials Science Quantum Physics

Authors: David M. Toyli , Christoph D. Weis , Gregory D. Fuchs , Thomas Schenkel , David D. Awschalom

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Abstract

We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist. This method enables high-throughput nanofabrication of single NV centers on sub-100 nm length scales. Secondary ion mass spectroscopy (SIMS) measurements facilitate depth profiling of the implanted nitrogen to provide three-dimensional characterization of the NV center spatial distribution. Measurements of NV center coherence with on-chip coplanar waveguides suggest a pathway for incorporating this scalable nanofabrication technique in future quantum applications.

Keywords

nitrogen vacancy centers diamond nanofabrication ion implantation quantum coherence coplanar waveguides

Cite

@article{arxiv.1007.0240,
  title  = {Chip-scale nanofabrication of single spins and spin arrays in diamond},
  author = {David M. Toyli and Christoph D. Weis and Gregory D. Fuchs and Thomas Schenkel and David D. Awschalom},
  journal= {arXiv preprint arXiv:1007.0240},
  year   = {2010}
}

Comments

This paper has been withdrawn by the authors. 14 pages, 3 figures; Posting has been removed due to editorial request from ACS Nano Letters; This version has been removed by arXiv admin because it contains an inappropriate withdrawal notice

Chip-scale nanofabrication of single spins and spin arrays in diamond

Abstract

Keywords

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