Calculation of thermal parameters of SiGe microbolometers
Materials Science
2012-08-31 v1 Optics
Abstract
The thermal parameters of a SiGe microbolometer were calculated using numerical modeling. The calculated thermal conduction and thermal response time are in good agreement with the values found experimentally and range between 2x10 and 7x10 W/K and 1.5 and 4.5 ms, respectively. High sensitivity of microbolometer is achieved due to optimization of the thermal response time and thermal conduction by fitting the geometry of supporting heat-removing legs or by selection of a suitable material providing boundary thermal resistance higher than 8x10 cmK/W at the SiGe interface.
Keywords
Cite
@article{arxiv.1208.6147,
title = {Calculation of thermal parameters of SiGe microbolometers},
author = {A. V. Voitsekhovskii and D. V. Grigoryev and V. A. Yuryev and S. N. Nesmelov},
journal= {arXiv preprint arXiv:1208.6147},
year = {2012}
}
Comments
11 pages, 6 figures