English

Calculation of thermal parameters of SiGe microbolometers

Materials Science 2012-08-31 v1 Optics

Abstract

The thermal parameters of a SiGe microbolometer were calculated using numerical modeling. The calculated thermal conduction and thermal response time are in good agreement with the values found experimentally and range between 2x107^-7 and 7x108^-8 W/K and 1.5 and 4.5 ms, respectively. High sensitivity of microbolometer is achieved due to optimization of the thermal response time and thermal conduction by fitting the geometry of supporting heat-removing legs or by selection of a suitable material providing boundary thermal resistance higher than 8x103^-3 cm2^2K/W at the SiGe interface.

Keywords

Cite

@article{arxiv.1208.6147,
  title  = {Calculation of thermal parameters of SiGe microbolometers},
  author = {A. V. Voitsekhovskii and D. V. Grigoryev and V. A. Yuryev and S. N. Nesmelov},
  journal= {arXiv preprint arXiv:1208.6147},
  year   = {2012}
}

Comments

11 pages, 6 figures