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A simple method for monitoring uniformity of epitaxial semiconductor structures

Materials Science 2007-05-23 v1
Authors: G. G. Kozlov
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Abstract

A simple method for visualization of nonuniformity of planar MBE structures is proposed. The method is based on measuring the relief of the photo-EMF. The method can be applied to a wide variety of semiconductor structures and does not require any expensive equipment.

Keywords

epitaxial semiconductor structures uniformity monitoring photo-EMF MBE visualization

Cite

@article{arxiv.cond-mat/0608503,
  title  = {A simple method for monitoring uniformity of epitaxial semiconductor structures},
  author = {G. G. Kozlov},
  journal= {arXiv preprint arXiv:cond-mat/0608503},
  year   = {2007}
}

Comments

2 pages, 2 figures

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