We have developed a real-time beam current density meter for charged particle beams. It measures the mean current density by collimating a uniform and large diameter primary beam. The suppression of the secondary electrons and the deflection of the beam were simulated, and it was tested with a 105 keV Ar7+ ion beam.
@article{arxiv.1302.4812,
title = {A real-time beam current density meter},
author = {Junliang Liu and Deyang Yu and Fangfang Ruan and Yingli Xue and Wei Wang},
journal= {arXiv preprint arXiv:1302.4812},
year = {2017}
}
Comments
3 pages, 5 figures, submitted to Review of Scientific Instruments