A novel x-axis tuning fork MEMS gyroscope with "8 vertical springs-proofmass" structure for Coriolis effect detection is presented. Compared with the common single-plane springs, the 8 vertical springs, symmetrically located at the top and bottom sides, more stably suspend the large thick proofmass featuring large capacitance variation and low mechanical noise. A bulk-micromachining technology is applied to obtain the large proofmass and twins-like dual beams. During the fabrication process, the dimensions of the 8 vertical springs are precisely confined by thermal oxide protected limit trenches (LTs) sidewalls and the extreme slowly etched (111)-planes; therefore a small mismatch of less than 30 Hz is achieved before tuning. Initial test shows a sensitivity of 0.15mV/(deg/s) and rate resolution around 0.1deg/s under atmosphere pressure.
Cite
@article{arxiv.0802.3038,
title = {A Novel X-Axis Tuning Fork Gyroscope with "8 Vertical Springs-Proofmass" Structure on (111)-Silicon},
author = {Fei Duan and Jiwei Jiao and Yucai Wang and Ying Zhang and Binwei Mi and Jinpeng Li and Jian Zhu and Yuelin Wang},
journal= {arXiv preprint arXiv:0802.3038},
year = {2008}
}
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Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)