This research explores the design and conducts a comparative analysis of a noninsulated Capacitive Micromachined Ultrasonic Transducer (CMUT) featuring an innovative asymmetric electrode configuration to improve the performance of the device. Specifically, this configuration involves the utilization of a top electrode with a smaller radius in comparison to the bottom electrode. The study encompasses an investigation into the effects of varying biasing voltage within the range of 40 V to 100 V. The materials employed in this study are carefully selected to optimize the CMUT's performance. The substrate material is silicon, and the bottom and top electrodes are made from aluminium. Additionally, silicon dioxide is utilized as the foundation material within the device's structure.
Cite
@article{arxiv.2310.15403,
title = {A Comparative Study between Silicon Carbide and Silicon Nitride based Single Cell CMUT},
author = {Rakesh Kanjilal and Reshmi Maity},
journal= {arXiv preprint arXiv:2310.15403},
year = {2023}
}
Comments
copyright (2023) Inventive Research Organization. This is an open access article under the Creative Commons Attribution-NonCommercial International (CC BY-NC 4.0) License. This is a "Preprint" version of the main publication, published copy of the article can be accessed from the publisher's directory (DOI: 10.36548/jei.2023.3.006)