Practical Classical Molecular Dynamics Simulations for Low-Temperature Plasma Processing: A review
Plasma Physics
2023-12-14 v2 Computational Physics
Abstract
Molecular Dynamics simulations are becoming a powerful tool for examining and predicting atomic and molecular processes in various environment. The present review shows how, in the fields of plasma physics, chemistry and interactions with materials and or liquids, Molecular Dynamics simulations are able to provide significant insights into various processes, among them: gas phase polymerization, deposition, plasma-catalysis, discharge breakdown, vibrational excitation.
Cite
@article{arxiv.2311.03789,
title = {Practical Classical Molecular Dynamics Simulations for Low-Temperature Plasma Processing: A review},
author = {Pascal Brault},
journal= {arXiv preprint arXiv:2311.03789},
year = {2023}
}
Comments
accept{\'e} le 10/12/2023