Multi-NA Metalens Array for Compact High-NA Microscopy
Optics
2025-10-09 v1 Applied Physics
Abstract
We demonstrate a CMOS-compatible silicon-rich nitride metalens array for visible microscopy at 660 nm. Three co-planar elements provide numerical apertures of 0.54, 0.92, and 0.97, enabling within-sample NA benchmarking without objective swaps. Imaging of annular cell monolayers labeled in the AF647 ZO-1 channel shows progressive sharpening of junctional edges and reduced blur with increasing NA, consistent with diffraction-limited scaling. The compact, planar platform supports direct integration with image sensors, offering a practical route to high-NA fluorescence bioimaging in space-constrained, low-cost systems.
Keywords
Cite
@article{arxiv.2510.07123,
title = {Multi-NA Metalens Array for Compact High-NA Microscopy},
author = {Alireza Khalilian and Jie Fan and Mehdi Sh. Yeganeh and Joe Lo and Yasha Yi},
journal= {arXiv preprint arXiv:2510.07123},
year = {2025}
}