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Lithographically Defined Zerogap Strain Sensors

Applied Physics 2024-09-06 v1

Abstract

Metal thin films on soft polymers provide a unique opportunity for resistance-based strain sensors. A mechanical mismatch between the conductive film and the flexible substrate causes cracks to open and close, changing the electrical resistance as a function of strain. However, the very randomness of the formation, shape, length, orientation, and distance between adjacent cracks limits the sensing range as well as repeatability. Herein, we present a breakthrough: the Zerogap Strain Sensor, whereby lithography eliminates randomness and violent tearing process inherent in conventional crack sensors and allows for short periodicity between gaps with gentle sidewall contacts, critical in high strain sensing enabling operation over an unprecedently wide range. Our sensor achieves a gauge factor of over 15,000 at {\epsilon}ext=18%, the highest known value. With the uniform gaps of three-to-ten thousand nanometer widths characterized by periodicity and strain, this approach has far reaching implications for future strain sensors whose range is limited only by that of the flexible substrate, with non-violent operations that always remain below the tensile limit of the metal.

Keywords

Cite

@article{arxiv.2403.08288,
  title  = {Lithographically Defined Zerogap Strain Sensors},
  author = {Mahsa Haddadi Moghaddam and Zhihao Wang and Daryll J. C Dalayoan and Daehwan Park and Hwanhee Kim and Sunghoon Im and Kyungbin Ji and Daeshik Kang and Bamadev Das and Dai Sik Kim},
  journal= {arXiv preprint arXiv:2403.08288},
  year   = {2024}
}
R2 v1 2026-06-28T15:18:19.812Z