Line-field Coherent Sensing with LED Illumination
Optics
2022-02-25 v1 Instrumentation and Detectors
Abstract
We describe a method of low-coherence interferometry based optical profilometry using standard light-emitting diode (LED) illumination and complementary metal-oxide-semiconductor (CMOS) image sensors. A line-field illumination strategy allows for the simultaneous measurement of many points in space. Micron scale accuracy and resolution are achieved and demonstrated using a variety of targets.
Cite
@article{arxiv.2202.12161,
title = {Line-field Coherent Sensing with LED Illumination},
author = {Celalettin Yurdakul and David S. Millar and Hassan Mansour and Pu Wang and Keisuke Kojima and Toshiaki Koike-Akino and Kieran Parsons and Philip V. Orlik},
journal= {arXiv preprint arXiv:2202.12161},
year = {2022}
}