Josephson Junctions defined by a Nano-Plough

We define superconducting constrictions by ploughing a deposited Aluminum film with a scanning probe microscope. The microscope tip is modified by electron beam deposition to form a nano-plough of diamond-like hardness, what allows the definition of highly transparent Josephson junctions. Additionally a dc-SQUID is fabricated to verify appropriate functioning of the junctions. The devices are easily integrated in mesoscopic devices as local radiation sources and can be used as tunable on-chip millimeter wave sources.