English

Detecting Atomic Scale Surface Defects in STM of TMDs with Ensemble Deep Learning

Materials Science 2023-12-11 v1 Machine Learning

Abstract

Atomic-scale defect detection is shown in scanning tunneling microscopy images of single crystal WSe2 using an ensemble of U-Net-like convolutional neural networks. Standard deep learning test metrics indicated good detection performance with an average F1 score of 0.66 and demonstrated ensemble generalization to C-AFM images of WSe2 and STM images of MoSe2. Defect coordinates were automatically extracted from defect detections maps showing that STM image analysis enhanced by machine learning can be used to dramatically increase sample characterization throughput.

Keywords

Cite

@article{arxiv.2312.05160,
  title  = {Detecting Atomic Scale Surface Defects in STM of TMDs with Ensemble Deep Learning},
  author = {Darian Smalley and Stephanie D. Lough and Luke Holtzman and Kaikui Xu and Madisen Holbrook and Matthew R. Rosenberger and J. C. Hone and Katayun Barmak and Masahiro Ishigami},
  journal= {arXiv preprint arXiv:2312.05160},
  year   = {2023}
}

Comments

9 pages, 4 figures, submitted to MRS Advances as a conference preceding for the 2023 MRS Fall Meeting & Exhibit

R2 v1 2026-06-28T13:45:16.507Z