Compact On-Chip crystalline Resonator Integration with Etching Tapered Fiber Waveguide
Abstract
Whispering-gallery mode crystalline resonators currently maintain the best quality factor (Q) record, however, compact on-chip packaging is still a challenge although various coupling architectures have been developed. Here, a chemical etching method is proposed to fabricate a miniaturized tapered fiber waveguide on silicon substrate. The Marangoni effect is implemented to reduce the surface roughness of the cone region. The optical loss of 0.1 dB/mm is obtained, and the Q of on-chip crystalline resonator exceeds 108. Additionally, TEC is implanted in the package to actively customize the temperature, and the temperature response of 18 pm/K is consistent with the theoretical calculation.
Keywords
Cite
@article{arxiv.2211.06896,
title = {Compact On-Chip crystalline Resonator Integration with Etching Tapered Fiber Waveguide},
author = {Jun Yue and Jiamin Rong and Enbo Xing and Weikang Xu and Jiamin Bai and Wenyao Liu and Jun Tang and Jun Liu},
journal= {arXiv preprint arXiv:2211.06896},
year = {2023}
}
Comments
The manuscript has an error display and needs to be corrected