English

A computationally efficient method to solve the Takagi-Taupin equations for a large deformed crystal

Optics 2016-06-03 v2 Instrumentation and Detectors

Abstract

We present a treatise on solving the Takagi-Taupin equations in the case of a strain field with an additional, spatially slowly varying component (owing to \emph{e.g.}~heat expansion or angular compression). We show that the presence of such a component in a typical case merely shifts the reflectivity curve as a function of wavelength or incidence angle, while having a negligible effect on its shape. On the basis of the derived result, we develop a computationally efficient method to calculate the reflectivity curve of a large deformed crystal. The validity of the method is demonstrated by comparing computed reflectivity curves with experimental ones for bent silicon wafers. A good agreement is observed.

Keywords

Cite

@article{arxiv.1601.07427,
  title  = {A computationally efficient method to solve the Takagi-Taupin equations for a large deformed crystal},
  author = {Ari-Pekka Honkanen and Giulio Monaco and Simo Huotari},
  journal= {arXiv preprint arXiv:1601.07427},
  year   = {2016}
}

Comments

5 pages, 7 figures. Submitted to Journal of Applied Crystallography

R2 v1 2026-06-22T12:37:52.786Z