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Nano- and micromechanical oscillators with high quality (Q) factors have gained much attention for their potential application as ultrasensitive detectors. In contrast to micro-fabricated devices, optically trapped nanoparticles in vacuum…

Mesoscale and Nanoscale Physics · Physics 2013-12-10 Jan Gieseler , Lukas Novotny , Romain Quidant

Future gravitational wave observatories require significant advances in all aspects of their seismic isolation; inertial sensors being a pressing example. Inertial sensors using gram-scale high mechanical Q factor (Q) glass resonators…

All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…

Mesoscale and Nanoscale Physics · Physics 2016-04-07 Richard A. Norte , Joao P. Moura , Simon Gröblacher

Engineering nano-mechanical quantum systems possessing ultra-long motional coherence times allow for applications in ultra-sensitive quantum sensing, motional quantum memories and motional interfaces between other carriers of quantum…

Quantum Physics · Physics 2012-10-09 M. Cirio , J. Twamley , G. K. Brennen

The enormous stiffness and low density of graphene make it an ideal material for nanoelectromechanical (NEMS) applications. We demonstrate fabrication and electrical readout of monolayer graphene resonators, and test their response to…

Nanoelectromechanical Systems (NEMS) have emerged as a promising technology for performing the mass spectrometry of large biomolecules and nanoparticles. As nanoscale objects land on NEMS sensor one by one, they induce resolvable shifts in…

Mesoscale and Nanoscale Physics · Physics 2019-07-24 Mert Yuksel , Ezgi Orhan , Cenk Yanik , Atakan B. Ari , Alper Demir , M. Selim Hanay

Engineered micro- and nanomechanical resonators with ultra-low dissipation constitute the ideal systems for applications ranging from high-precision sensing such as magnetic resonance force microscopy, to quantum transduction between…

Mesoscale and Nanoscale Physics · Physics 2021-10-27 Dennis Høj , Fengwen Wang , Wenjun Gao , Ulrich Busk Hoff , Ole Sigmund , Ulrik Lund Andersen

Most technologies, including conventional mass spectrometry, struggle to measure the mass of particles in the MDa to GDa range. Although this mass range appears optimal for nanomechanical resonators, early nanomechanical-MS systems suffered…

Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the…

Applied Physics · Physics 2023-03-22 Daehun Lee , Shahin Jahanbani , Jack Kramer , Ruochen Lu , Keji Lai

Nanomechanical resonators (NMRs) offer a promising alternative to traditional thermal-based radiation detectors due to their immunity to electrical noise. In recent years, these sensors have reached the previously unattained theoretical…

Instrumentation and Detectors · Physics 2026-05-05 Mathis Turgeon-Roy , Mohammed Shakir , Zachary Louis-Seize , Raphael St-Gelais

The excellent mechanical properties make graphene promising for realizing nanomechanical resonators with high resonant frequencies, large quality factors, strong nonlinearities, and the capability to effectively interface with various…

Mesoscale and Nanoscale Physics · Physics 2025-07-24 Yi-Bo Wang , Zhuo-Zhi Zhang , Chen-Xu Wu , Yu-Shi Zhang , Guo-Sheng Lei , Xiang-Xiang Song , Guo-Ping Guo

We describe the measurement and modeling of amplitude noise and phase noise in ultra-high Q nanomechanical resonators made from stoichiometric silicon nitride. With quality factors exceeding 2 million, the resonators' noise performance is…

Mesoscale and Nanoscale Physics · Physics 2012-06-08 King Y. Fong , Wolfram H. P. Pernice , Hong X. Tang

The sensitivity of mechanical resonators to physical quantities such as acceleration, pressure, mass and temperature enables them to underpin sensing and metrology applications. Here, we observe that the resonance frequency of a…

Applied Physics · Physics 2025-09-15 Toji Thomas , Kevin F. MacDonald , Eric Plum

We present measurements on nanomechanical resonators machined from Silicon-on-Insulator substrates. The resonators are designed as freely suspended Au/Si beams of lengths on the order of 1 - 4 um and a thickness of 200 nm. The beams are…

Mesoscale and Nanoscale Physics · Physics 2009-10-31 H. Kroemmer , A. Erbe , A. Tilke , S. Manus , R. H. Blick

Systems with low mechanical dissipation are extensively used in precision measurements such as gravitational wave detection, atomic force microscopy and quantum control of mechanical oscillators via opto- and electromechanics. The…

Because of their small size, low loss, and compatibility with magnetic fields and elevated temperatures, surface acoustic wave resonators hold significant potential as future quantum interconnects. Here, we design, fabricate, and…

Mesoscale and Nanoscale Physics · Physics 2024-01-12 Yadav P. Kandel , Suraj Thapa Magar , Arjun Iyer , William H. Renninger , John M. Nichol

Nanomechanical resonant sensors that are based on detecting and tracking the resonance frequency deviations due to events of interest are being advocated for a variety of applications. All sensor schemes currently in use are subject to a…

Applied Physics · Physics 2021-11-12 Alper Demir

State of the art nanomechanical resonators present quality factors Q ~ 10^3 - 10^5, which are much lower than those that can be naively extrapolated from the behavior of micromechanical resonators. We analyze the dissipation mechanism that…

Mesoscale and Nanoscale Physics · Physics 2009-09-04 I. Wilson-Rae

Bestriding the realms of classical and quantum mechanics, nanomechanical structures offer great promise for a huge variety of applications, from computer memory elements \cite{badzey04} and ultra-fast sensors to quantum computing.…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 R. L. Badzey , G. Zolfagharkhani , S. -B. Shim , A. Gaidarzhy , P. Mohanty

We perform both molecular dynamics simulations and theoretical analysis to study the sensitivity of the graphene nanomechanical resonator based mass sensors, which are actuated following the global extended mode or the localized edge mode.…

Mesoscale and Nanoscale Physics · Physics 2019-01-11 Guang-Rong Han , Jin-Wu Jiang