Related papers: Thermoelastic Damping in Micro- and Nano-Mechanica…
Fabrication of Nano-Electro-Mechanical-Systems (NEMS) of high quality is nowadays extremely efficient. These NEMS will be used as sensors and actuators in integrated systems. Their use however raises questions about their interface…
The dynamic behavior of a capacitive micro-electro-mechanical (MEMS) accelerometer is evaluated by using a theoretical approach which makes use of a squeeze film damping (SFD) model and ideal gas approach. The study investigates the…
We study the slow phase of thermally activated magnetic relaxation in finite two-dimensional ensembles of dipolar interacting ferromagnetic nanoparticles whose easy axes of magnetization are perpendicular to the distribution plane. We…
Polygon resonators are promising candidates for nanomechanical applications due to their compact architecture and high force sensitivity. Here, we develop an analytical framework to predict the resonance frequencies and dissipation dilution…
The nanobeam resonator is the key mechanical component in the nano-electromechanical system. In addition to its high frequency originating from its low dimension, the performance is significantly influenced by the circumstances, especially…
We find that the damping of micromechanical cantilevers is sensitive to the relaxation dynamics of paramagnetic ions contained within the levers. We measure cantilevers containing paramagnetic Mn ions as a function of temperature, magnetic…
We investigate the effect of free electrons on the quality factor (Q) of a metallic nanomechanical resonator in the form of a thin elastic beam. The flexural and longitudinal modes of the beam are modeled using thin beam elasticity theory,…
We provide a detailed description of a general procedure by which a nano/micro-mechanical resonator can be calibrated using its thermal motion. A brief introduction to the equations of motion for such a resonator is presented, followed by a…
This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena…
Major challenges of micro thermal machines are the thermal insulation and mechanical tolerance in the case of sliding piston. Switching from piston to membrane in microengines can alleviate the latest and lead to planar architectures.…
The displacement noise in the test mass mirrors of interferometric gravitational wave detectors is proportional to their elastic dissipation at the observation frequencies. In this paper, we analyze one fundamental source of dissipation in…
We report on the fabrication of sensitive nanotorsional resonators, which can be utilized as magnetometers for investigating the magnetization dynamics in small magnetic elements. The thermo-mechanical noise is calibrated with the resonator…
The position noise spectra of six drums on a single chip were measured on a single cooldown below 1.3 kelvin. Cryostat temperatures as low as 0.7 mK were achieved. The temperature dependence of the resonance frequency and linewidth of the…
We experimentally investigate dissipation in mechanical resonators made of a disordered superconducting thin film of Molybdenum-Rhenium(MoRe) alloy. By electrostatically driving the drum with a resonant AC voltage, we detect its motion…
Small thermodynamic systems exhibit peculiar behavior different from that observed in long-scale systems. Non-equilibrium processes taking place in those systems are strongly influenced by the presence of fluctuations which can be large.…
Micro and nanomechanical resonators with ultra-low dissipation have great potential as useful quantum resources. The superfluid micromechanical resonators presented here possess several advantageous characteristics: straightforward…
Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a prominent example. Typically, in order to minimize energy…
We have used nanoelectromechanical resonators to probe superfluid $^4$He at different temperature regimes, spanning over four orders of magnitude in damping. These regimes are characterized by the mechanisms which provide the dominant…
The oscillatory dynamics of nanoelectromechanical systems (NEMS) is at the heart of many emerging applications in nanotechnology. For common NEMS, such as beams and strings, the oscillatory dynamics is formulated using a dissipationless…
We have studied damping in polycrystalline Al nanomechanical resonators by measuring the temperature dependence of their resonance frequency and quality factor over a temperature range of 0.1 - 4 K. Two regimes are clearly distinguished…