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Electron backscatter diffraction is one of the most prevalent techniques used for microstructural characterization. In recent years, there has been an increase in the use of data-driven methods to analyze raw Kikuchi patterns. However, most…

Materials Science · Physics 2026-01-21 Qi Zhang , Santiago Benito , Sebastian Weber , Markus Stricker

Scanning transmission electron microscopy (STEM) is the most widespread adopted tool for atomic scale characterization of two-dimensional (2D) materials. Many 2D materials remain susceptible to electron beam damage, despite the standardized…

Materials Science · Physics 2021-08-11 Sytze de Graaf , Majid Ahmadi , Ivan Lazić , Eric G. T. Bosch , Bart J. Kooi

High angular resolution electron backscatter diffraction (HR-EBSD) affords an increase in angular resolution, as compared to 'conventional' Hough transform based EBSD, of two orders of magnitude, enabling measurements of relative…

Instrumentation and Detectors · Physics 2017-10-03 T Ben Britton , James L R Hickey

We introduce the EMC algorithm for reconstructing a particle's 3D diffraction intensity from very many photon shot-noise limited 2D measurements, when the particle orientation in each measurement is unknown. The algorithm combines a…

Data Analysis, Statistics and Probability · Physics 2010-03-04 Duane Ne-Te Loh , Veit Elser

Scanning transmission electron microscopy (STEM) is now the primary tool for exploring functional materials on the atomic level. Often, features of interest are highly localized in specific regions in the material, such as ferroelectric…

Materials Science · Physics 2021-08-11 Nicole Creange , Ondrej Dyck , Rama K. Vasudevan , Maxim Ziatdinov , Sergei V. Kalinin

Since the introduction of Direct Electron Detectors (DEDs), the resolution and range of macromolecules amenable to this technique has significantly widened, generating a broad interest that explains the well over a dozen reviews in top…

Computer Vision and Pattern Recognition · Computer Science 2017-01-03 Carlos Oscar S. Sorzano , Jose Maria Carazo

In our article we report first quantitative measurements of imaging performance for the current generation of hybrid pixel detector, Medipix3, as direct electron detector. Utilising beam energies of 60 & 80 keV, measurements of modulation…

We report resolution enhancement in scanning electron microscopy (SEM) images using a generative adversarial network. We demonstrate the veracity of this deep learning-based super-resolution technique by inferring unresolved features in…

Computer Vision and Pattern Recognition · Computer Science 2019-08-21 Kevin de Haan , Zachary S. Ballard , Yair Rivenson , Yichen Wu , Aydogan Ozcan

We describe a hybrid pixel array detector (EMPAD - electron microscope pixel array detector) adapted for use in electron microscope applications, especially as a universal detector for scanning transmission electron microscopy. The 128 x…

Deep learning has demonstrated superb efficacy in processing imaging data, yet its suitability in solving challenging inverse problems in scientific imaging has not been fully explored. Of immense interest is the determination of local…

Materials Science · Physics 2019-02-20 Nouamane Laanait , Qian He , Albina Y. Borisevich

We present a new method that views object detection as a direct set prediction problem. Our approach streamlines the detection pipeline, effectively removing the need for many hand-designed components like a non-maximum suppression…

Computer Vision and Pattern Recognition · Computer Science 2020-05-29 Nicolas Carion , Francisco Massa , Gabriel Synnaeve , Nicolas Usunier , Alexander Kirillov , Sergey Zagoruyko

Multispectral pedestrian detection is an important task for many around-the-clock applications, since the visible and thermal modalities can provide complementary information especially under low light conditions. Due to the presence of two…

Computer Vision and Pattern Recognition · Computer Science 2024-11-06 Yinghui Xing , Shuo Yang , Song Wang , Shizhou Zhang , Guoqiang Liang , Xiuwei Zhang , Yanning Zhang

This comprehensive review discusses the development of scanning electron microscopy and the application of this technology in different fields such as biology, nanobiotechnology and biomedical science. Besides being a tool for high…

Quantitative Methods · Quantitative Biology 2023-11-02 Aniruddha Acharya

Electron backscatter diffraction (EBSD) in the scanning electron microscope is routinely used for microstructural characterisation of polycrystalline materials. Maps of EBSD data are typically acquired at high stage tilt and slow scan…

Materials Science · Physics 2020-09-01 Vivian Tong , Thomas Benjamin Britton

Differential phase contrast (DPC) imaging in scanning transmission electron microscopy (STEM) maps projected electric fields through the phase sensitivity of segmented low-angle detectors. Although typically applied to atomic-resolution…

The need to acquire multiple angle-resolved electron energy loss spectra (EELS) is one of the several critical challenges associated with electron magnetic circular dichroism (EMCD) experiments. If the experiments are performed by scanning…

In this research, we introduce a unified end-to-end Automated Defect Classification-Detection-Segmentation (ADCDS) framework for classifying, detecting, and segmenting multiple instances of semiconductor defects for advanced nodes. This…

Computer Vision and Pattern Recognition · Computer Science 2024-09-09 Bappaditya Dey , Matthias Monden , Victor Blanco , Sandip Halder , Stefan De Gendt

Transmission electron microscopy (TEM) is a potent technique for the determination of three-dimensional atomic scale structure of samples in structural biology and materials science. In structural biology, three-dimensional structures of…

Change detection is a critical task in earth observation applications. Recently, deep learning-based methods have shown promising performance and are quickly adopted in change detection. However, the widely used multiple encoder and single…

Computer Vision and Pattern Recognition · Computer Science 2023-11-21 Sijie Zhao , Xueliang Zhang , Pengfeng Xiao , Guangjun He

Despite the widespread use of Scanning Transmission Electron Microscopy (STEM) for observing the structure of materials at the atomic scale, a detailed understanding of some relevant electron beam damage mechanisms is limited. Recent…