Related papers: SPARSE -- Efficient High-Resolution SEM Imaging of…
Scanning Electron Microscopy (SEM) is pivotal in revealing intricate micro- and nanoscale features across various research fields. However, obtaining high-resolution SEM images presents challenges, including prolonged scanning durations and…
In this study, we present a computational framework tailored for the precise detection and comprehensive analysis of nanoparticles within scanning electron microscopy (SEM) images. The primary objective of this framework revolves around the…
The scanning electron microscope (SEM) produces an image of a sample by scanning it with a focused beam of electrons. The electrons interact with the atoms in the sample, which emit secondary electrons that contain information about the…
Scanning electron microscopy (SEM) has been widely utilized in the field of materials science due to its significant advantages, such as large depth of field, wide field of view, and excellent stereoscopic imaging. However, at high…
Scanning Electron Microscopy (SEM) is indispensable in modern materials science, enabling high-resolution imaging across a wide range of structural, chemical, and functional investigations. However, SEM imaging remains constrained by…
Fast and sensitive detector arrays enable image scanning microscopy (ISM), overcoming the trade-off between spatial resolution and signal-to-noise ratio (SNR) typical of confocal microscopy. However, current ISM approaches cannot provide…
We report resolution enhancement in scanning electron microscopy (SEM) images using a generative adversarial network. We demonstrate the veracity of this deep learning-based super-resolution technique by inferring unresolved features in…
Scanning Transmission Electron Microscopy (STEM) has become the main stay for materials characterization on atomic level, with applications ranging from visualization of localized and extended defects to mapping order parameter fields. In…
Single-beam scanning electron microscopes (SEM) are widely used to acquire massive data sets for biomedical study, material analysis, and fabrication inspection. Datasets are typically acquired with uniform acquisition: applying the…
Scanning electron microscopy (SEM), a century-old technique, is today a ubiquitous method of imaging the surface of nanostructures. However, most SEM detectors simply count the number of secondary electrons from a material of interest, and…
We present a novel approach to implement compressive sensing in laser scanning microscopes (LSM), specifically in image scanning microscopy (ISM), using a single-photon avalanche diode (SPAD) array detector. Our method addresses two…
A central problem in neuroscience is reconstructing neuronal circuits on the synapse level. Due to a wide range of scales in brain architecture such reconstruction requires imaging that is both high-resolution and high-throughput. Existing…
Scanning electron microscopy (SEM) is indispensable in diverse applications ranging from microelectronics to food processing because it provides large depth-of-field images with a resolution beyond the optical diffraction limit. However,…
In this article, a new scanning electron microscopy (SEM) image composition technique is described, which can significantly reduce drift related image corruptions. Drift-distortion commonly causes blur and distortions in the SEM images.…
In the field of integrated circuit manufacturing, the detection and classification of nanoscale wafer defects are critical for subsequent root cause analysis and yield enhancement. The complex background patterns observed in scanning…
Computed tomography is widely used to examine internal structures in a non-destructive manner. To obtain high-quality reconstructions, one typically has to acquire a densely sampled trajectory to avoid angular undersampling. However, many…
In scanning electron microscopy, the achievable image quality is often limited by a maximum feasible acquisition time per dataset. Particularly with regard to three-dimensional or large field-of-view imaging, a compromise must be found…
Extracting high-fidelity 2D contours from Scanning Electron Microscope (SEM) images is critical for calibrating Optical Proximity Correction (OPC) models. While foundation models like Segment Anything 2 (SAM2) are promising, adapting them…
We introduce a compressive single-pixel imaging (SPI) framework for high-resolution image capture in fractions of a second. This framework combines a dedicated sampling strategy with a tailored reconstruction method to enable high-quality…
We demonstrate a multi-beam scanning transmission electron microscopy (STEM) imaging that integrates down-sampling with super-resolution image reconstruction via a compressive sensing framework. A custom condenser aperture with six randomly…