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This paper reports the first high-performance acoustic filters toward millimeter wave (mmWave) bands using transferred single-crystal thin film lithium niobate (LiNbO3). By transferring LiNbO3 on the top of silicon (Si) and sapphire (Al2O3)…

Signal Processing · Electrical Eng. & Systems 2024-05-31 Omar Barrera , Sinwoo Cho , Kenny Hyunh , Jack Kramer , Michael Liao , Vakhtang Chulukhadze , Lezli Matto , Mark S. Goorsky , Ruochen Lu

This article presents an approach to control the operating frequency and fractional bandwidth (FBW) of miniature acoustic filters in thin-film lithium niobate (TFLN). More specifically, we used first-order antisymmetric (A1) mode…

Signal Processing · Electrical Eng. & Systems 2026-04-14 Taran Anusorn , Omar Barrera , Jack Kramer , Ian Anderson , Ziqian Yao , Vakhtang Chulukhadze , Ruochen Lu

This work reports an acoustic filter at 23.5 GHz with a low insertion loss (IL) of 2.38 dB and a 3-dB fractional bandwidth (FBW) of 18.2%, significantly surpassing the state-of-the-art. The device leverages electrically coupled acoustic…

Signal Processing · Electrical Eng. & Systems 2023-11-07 Omar Barrera , Sinwoo Cho , Lezli Matto , Jack Kramer , Kenny Huynh , Vakhtang Chulukhadze , Yen-Wei Chang , Mark S. Goorsky , Ruochen Lu

This letter presents miniature millimeter wave (mmWave, above 30 GHz) acoustic resonators based on a single-layer thin-film lithium niobate (LN) platform. More specifically, we present high performance third-order antisymmetric (A3) mode…

Applied Physics · Physics 2026-02-13 Vakhtang Chulukhadze , Jack Kramer , Tzu-Hsuan Hsu , Omar Barrera , Ruochen Lu

This paper reports the first piezoelectric acoustic filter in periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) at 23.8 GHz with low insertion loss (IL) of 1.52 dB and 3-dB fractional bandwidth (FBW) of 19.4%. The filter…

Acoustic filters are preferred front-end solutions at sub-6 GHz due to their superior frequency selectivity compared to electromagnetic (EM) counterparts. With the ongoing development of 5G and the evolution toward 6G, there is a growing…

Signal Processing · Electrical Eng. & Systems 2026-02-05 Omar Barrera , Sinwoo Cho , Jack Kramer , Vakhtang Chulukhadze , Tzu-Hsuan Hsu , Ruochen Lu

In this work, a 38.7 GHz acoustic wave ladder filter exhibiting insertion loss (IL) of 5.63 dB and 3-dB fractional bandwidth (FBW) of 17.6% is demonstrated, pushing the frequency limits of thin-film piezoelectric acoustic filter technology.…

Signal Processing · Electrical Eng. & Systems 2023-11-13 Omar Barrera , Sinwoo Cho , Jack Kramer , Vakhtang Chulukhadze , Joshua Campbell , Ruochen Lu

This paper presents significant frequency scaling of acoustic filter technology to 50 GHz. This achievement is enabled by the P3F LiNbO3 multilayer stack, in which piezoelectric thin-films of alternating orientations are transferred in…

Signal Processing · Electrical Eng. & Systems 2026-03-02 Omar Barrera , Jack Kramer , Lezli Matto , Vakhtang Chulukhadze , Sinwoo Cho , Michael Liao , Mark S. Goorsky , Ruochen Lu

This work reports a 50.74 GHz lithium niobate (LiNbO3) acoustic resonator with a high quality factor (Q) of 237 and an electromechanical coupling (k2) of 5.17% resulting in a figure of merit (FoM, Q x k2) of 12.2. The LiNbO3 resonator…

Signal Processing · Electrical Eng. & Systems 2023-11-07 Jack Kramer , Vakhtang Chulukhadze , Kenny Huynh , Omar Barrera , Michael Liao , Sinwoo Cho , Lezli Matto , Mark S. Goorsky , Ruochen Lu

This work presents the demonstration of lattice filters based on laterally excited bulk acoustic resonators (XBARs). Two filter implementations, namely direct lattice and layout-balanced lattice topologies, are designed and fabricated in…

Signal Processing · Electrical Eng. & Systems 2026-02-17 Taran Anusorn , Byeongjin Kim , Ian Anderson , Ziqian Yao , Ruochen Lu

This work proposes a double-layer thin-film lithium niobate (LiNbO3) longitudinally excited shear wave resonator with a theoretical electromechanical coupling coefficient exceeding 60%, RaR close to 28%, and no spurious modes. This…

Applied Physics · Physics 2025-10-14 Zhen-Hui Qin , Shu-Mao Wu , Chen-Bei Hao , Hua-Yang Chen , Sheng-Nan Liang , Si-Yuan Yu , Yan-Feng Chen

The availability of thin-film lithium niobate on insulator (LNOI) and advances in processing have led to the emergence of fully integrated LiNbO3 electro-optic devices, including low-voltage, high-speed modulators, electro-optic frequency…

Monolithic integration of multiband (1.4~ 6.0 GHz) RF acoustic devices were successfully demonstrated within the same process flow by using the lithium niobate (LN) thin film on silicon carbide (LNOSiC) substrate. A novel surface mode with…

Signal Processing · Electrical Eng. & Systems 2021-10-22 Shibin Zhang , Hongyan Zhou , Pengcheng Zheng , Jinbo Wu , Liping Zhang , Zhongxu Li , Kai Huang , Xin Ou , Xi Wang

Lithium niobate on insulator emerges as a promising platform for integrated microwave photonics because of its capability of ultralow-loss guidance and high-efficiency modulation of light. Chip-level integration of microwave filters is…

Optics · Physics 2022-09-19 Yue Yu , Xiankai Sun

In the past decade, lithium niobate (LiNbO3 or LN) photonics, thanks to its heat-free and fast electro-optical modulation, second-order non-linearities and low loss, has been extensively investigated. Despite numerous demonstrations of…

Surface Acoustic Waves on piezoelectric substrates can be used to investigate the dynamic conductivity of thin films in a non-contact and very sensitive way, especially at low conductivities. Here, we report on such surface acoustic wave…

Statistical Mechanics · Physics 2007-05-23 Andreas Heinrich , Andreas L. Hoerner , Achim Wixforth , Bernd Stritzker

A novel thin-film LiNbO3 (TFLN) electro-optic modulator is proposed and demonstrated. LiNbO3-silica hybrid waveguide is adopted to maintain low optical loss for an electrode spacing as narrow as 3 {\mu}m, resulting in a record low…

Applied Physics · Physics 2021-03-08 Xuecheng Liu , Bing Xiong , Changzheng Sun , Jian Wang , Zhibiao Hao , Lai Wang , Yanjun Han , Hongtao Li , Jiadong Yu , Yi Luo

Nonlinear periodically poled ridge LiNbO3 waveguides have been fabricated on silicon substrates. Components are carved with only use of a precision dicing machine without need for grinding or polishing steps. They show efficient second…

The continuous growth of global data traffic over the past three decades, along with advances in disaggregated computing architectures, presents significant challenges for optical transceivers in communication networks and high-performance…

High overtone bulk acoustic resonators are essential components in microwave signal processing and emerging quantum technologies; however, conventional designs suffer from limited impedance matching, spurious mode interference, and…

Mesoscale and Nanoscale Physics · Physics 2026-05-04 Zi-Dong Zhang , Zhen-Hui Qin , Yi-Han He , Yun-Fei Cheng , Hao Yan , Si-Yuan Yu , Ming-Hui Lu , Yan-Feng Chen
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