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Accurate segmentation and measurement of lithography scanning electron microscope (SEM) images are crucial for ensuring precise process control, optimizing device performance, and advancing semiconductor manufacturing yield. Lithography…

Computer Vision and Pattern Recognition · Computer Science 2025-11-18 Xinyu He , Botong Zhao , Bingbing Li , Shujing Lyu , Jiwei Shen , Yue Lu

The manipulation and control of nanoscale magnetic spin textures is of rising interest as they are potential foundational units in next-generation computing paradigms. Achieving this requires a quantitative understanding of the spin texture…

Artificial intelligence (AI) is rapidly emerging as an enabling tool for solving various complex materials design problems. This paper aims to review recent advances in AI-driven materials-by-design and their applications to energetic…

Materials Science · Physics 2023-05-12 Joseph B. Choi , Phong C. H. Nguyen , Oishik Sen , H. S. Udaykumar , Stephen Baek

We demonstrate a multi-beam scanning transmission electron microscopy (STEM) imaging that integrates down-sampling with super-resolution image reconstruction via a compressive sensing framework. A custom condenser aperture with six randomly…

Instrumentation and Detectors · Physics 2026-03-19 Akira Yasuhara , Takumi Sannomiya , Ryoichi Horisaki

Here a new microscopic method is proposed to image and characterize very thin samples like few-layer materials, organic molecules, and nanostructures with nanometer or sub-nanometer resolution using electron beams of energies lower than 20…

Instrumentation and Detectors · Physics 2016-01-06 Ing-Shouh Hwang

Nowadays, modern electron microscopes deliver images at atomic scale. The precise atomic structure encodes information about material properties. Thus, an important ingredient in the image analysis is to locate the centers of the atoms…

Computer Vision and Pattern Recognition · Computer Science 2017-09-13 Benjamin Berkels , Benedikt Wirth

Four-dimensional scanning transmission electron microscopy (4D-STEM) is a powerful tool that allows for the simultaneous acquisition of spatial and diffraction information, driven by recent advancements in direct electron detector…

Materials Science · Physics 2024-10-23 Ujjval Bansal , Amit Sharma , Barbara Putz , Christoph Kirchlechner , Subin Lee

Despite decades of research, the ultimate goal of nanotechnology--top-down manipulation of individual atoms--has been directly achieved with only one technique: scanning probe microscopy. In this Review, we demonstrate that scanning…

Scanning tunnelling microscopy (STM) is a powerful technique for imaging surfaces with atomic resolution, providing insight into physical and chemical processes at the level of single atoms and molecules. A regular task of STM image…

In the field of materials science, microscopy is the first and often only accessible method for structural characterization. There is a growing interest in the development of machine learning methods that can automate the analysis and…

Materials Science · Physics 2022-09-28 Shizhao Lu , Brian Montz , Todd Emrick , Arthi Jayaraman

Topology optimization (TO) in two dimensions often presents a trade-off between structural performance and manufacturability, with unpenalized (variable-thickness) methods yielding superior but complex designs, and penalized (SIMP) methods…

Computational Engineering, Finance, and Science · Computer Science 2025-07-28 Gabriel Stankiewicz , Chaitanya Dev , Paul Steinmann

With the development of affordable aberration-correctors, analytical scanning transmission electron microscopy (STEM) studies of complex interfaces can now be conducted at high spatial resolution at laboratories worldwide. Energy-dispersive…

Materials Science · Physics 2017-04-10 Steven R. Spurgeon , Yingge Du , Scott A. Chambers

The Production and Distributed Analysis (PanDA) system, originally developed for the ATLAS experiment at the CERN Large Hadron Collider (LHC), has evolved into a robust platform for orchestrating large-scale workflows across distributed…

Accurate characterization of silicon microstructures is essential for advancing microscale fabrication, quality control, and device performance. Traditional analysis using Scanning Electron Microscopy (SEM) often requires labor-intensive,…

Additive Manufacturing (AM) is transforming the manufacturing sector by enabling efficient production of intricately designed products and small-batch components. However, metal parts produced via AM can include flaws that cause inferior…

Computer Vision and Pattern Recognition · Computer Science 2024-11-05 Duy Nhat Phan , Sushant Jha , James P. Mavo , Erin L. Lanigan , Linh Nguyen , Lokendra Poudel , Rahul Bhowmik

Since the surge of data in materials science research and the advancement in machine learning methods, an increasing number of researchers are introducing machine learning techniques into the next generation of materials discovery, ranging…

Soft Condensed Matter · Physics 2024-08-12 Maya M. Martirossyan , Hongjin Du , Julia Dshemuchadse , Chrisy Xiyu Du

The robust approach for real-time analysis of the scanning transmission electron microscopy (STEM) data streams, based on the ensemble learning and iterative training (ELIT) of deep convolutional neural networks, is implemented on an…

Disordered Systems and Neural Networks · Physics 2022-07-27 Kevin M. Roccapriore , Matthew G. Boebinger , Ondrej Dyck , Ayana Ghosh , Raymond R. Unocic , Sergei V. Kalinin , Maxim Ziatdinov

Accelerating the discovery of mechanical properties in combinatorial materials requires autonomous experimentation that accounts for both instrument behavior and experimental cost. Here, an automated nanoindentation (AE-NI) framework is…

Materials Science · Physics 2025-11-24 Vivek Chawla , Stephen Puplampu , Haochen Zhu , Philip D. Rack , Dayakar Penumadu , Sergei Kalinin

In computer chip manufacturing, the study of etch patterns on silicon wafers, or metrology, occurs on the nano-scale and is therefore subject to large variation from small, yet significant, perturbations in the manufacturing environment. An…

Machine Learning · Computer Science 2019-10-23 Jack Kenney , John Valcore , Scott Riggs , Edward Rietman

The sensitivity of thin-film materials and devices to defects motivates extensive research into the optimization of film morphology. This research could be accelerated by automated experiments that characterize the response of film…