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We define superconducting constrictions by ploughing a deposited Aluminum film with a scanning probe microscope. The microscope tip is modified by electron beam deposition to form a nano-plough of diamond-like hardness, what allows the…

Mesoscale and Nanoscale Physics · Physics 2016-08-31 B. Irmer , R. H. Blick , F. Simmel , W. Goedel , H. Lorenz , J. P. Kotthaus

We have developed a fabrication technology for the development of large-scale superconducting integrated circuits with Nb-based Josephson junctions. The standard fabrication process with 10 mask levels uses four metal layers including 3 Nb…

Superconductivity · Physics 2021-07-30 Liliang Ying , Xue Zhang , Minghui Niu , Jie Ren , Wei Peng , Masaaki Meazawa , Zhen Wang

In this work, we present a numerical model specifically designed for 3D multilayer devices, with a focus on nanobridge junctions and coplanar waveguides. Unlike existing numerical models, ours does not approximate the physical layout or…

In an in-situ prepared three-terminal Josephson junction based on the topological insulator Bi$_4$Te$_3$ and the superconductor Nb the transport properties are studied. The differential resistance maps as a function of two bias currents…

Recent studies have shown that the critical currents of several metallic superconducting nanowires and Dayem bridges can be locally tuned using a gate voltage {V_g}. Here, we report a gate-tunable Josephson junction structure constructed…

We are developing a superconductor electronics fabrication process with up to nine planarized superconducting layers, stackable stud vias, self-shunted Nb/AlOx-Al/Nb Josephson junctions, and one layer of MoNx kinetic inductors. The minimum…

Controlled fabrication of twisted van der Waals heterostructures is essential to unlock the full potential of moire materials. However, achieving reproducibility remains a major challenge, particularly for air-sensitive materials such as…

Microscopic inhomogeneity within superconducting films is a critical bottleneck hindering the performance and scalability of quantum circuits. All-nitride Josephson Junctions (JJs) have attracted substantial attention for their potential to…

Quantum Physics · Physics 2025-12-09 Prachi Garg , Danqing Wang , Hong X. Tang , Baishakhi Mazumder

Electrical breakdown of a dielectric nanolayer between film electrodes under the combined action of direct current and capacitor discharge current makes it possible to form Josephson bridges with a reproducible resistance exceeding 1…

Superconductivity · Physics 2023-02-08 A. V. Krevsun , S. I. Bondarenko , V. P. Koverya

A new fabrication process for superconducting integrated digital circuits is reported. We have developed the "SIMIT Nb04" fabrication technique for superconducting integrated circuits with Nb-based Josephson junctions based on the validated…

Applied Physics · Physics 2023-08-21 Liliang Ying , Xue Zhang , Guixiang He , Weifeng Shi , Hui Xie , Linxian Ma , Hui Zhang , Jie Ren , Wei Peng , Zhen Wang

The Josephson junction is a crucial element in superconducting devices, and niobium is a promising candidate for the superconducting material due to its large energy gap relative to aluminum. AlO$_x$ has long been regarded as the highest…

We report on the fabrication and measurements of planar mesoscopic Josephson junctions formed by InAs nanowires coupled to superconducting Nb terminals. The use of Si-doped InAs-nanowires with different bulk carrier concentrations allowed…

Mesoscale and Nanoscale Physics · Physics 2012-05-11 H. Y. Gunel , I. E. Batov , H. Hardtdegen , K. Sladek , A. Winden , K. Weis , G. Panaitov , D. Gruetzmacher , Th. Schaepers

We demonstrate a direct writing method for the fabrication of planar Josephson junctions from high quality superconducting niobium titanium nitride (NbTiN) thin films, by creating local disorder using focused He-ion beam irradiation in a…

Superconductivity · Physics 2026-01-08 Aki Ruhtinas , Ilari J. Maasilta

We report on the first realization of Nb-based \textit{all-metallic} gated Dayem nano-bridge field-effect transistors (Nb-FETs). These Josephson devices operate up to a temperature of $\sim 3$ K, and exhibit full suppression of the…

Mesoscale and Nanoscale Physics · Physics 2020-06-24 Giorgio De Simoni , Claudio Puglia , Francesco Giazotto

Josephson junctions form the essential non-linearity for almost all superconducting qubits. The junction is formed when two superconducting electrodes come within $\sim$1 nm of each other. Although the capacitance of these electrodes is a…

We propose a realization of the superconducting diode effect in flux biased superconducting circuits of Josephson junctions. So far the observation of the superconducting diode effect has been limited to rather exotic material platforms. In…

Superconductivity · Physics 2022-12-07 Rafael Haenel , Oguzhan Can

We describe a fabrication stackup for digital logic with 16 superconducting NbTiN layers, self-shunted a-silicon barrier Josephson Junctions (JJs), and low loss, high-$\kappa$ tunable HZO capacitors. The stack enables 400 MJJ/cm$^2$ device…

The narrow bandgap of semiconductors allows for thick, uniform Josephson junction barriers, potentially enabling reproducible, stable, and compact superconducting qubits. We study vertically stacked van der Waals Josephson junctions with…

We have realised laser-doped all-silicon superconducting (S)/ normal metal (N) bilayers of tunable thickness and dopant concentration. We observed a strong reduction of the bilayers critical temperature when increasing the normal metal…

Mesoscale and Nanoscale Physics · Physics 2017-07-12 F. Chiodi , J. -E. Duvauchelle , C. Marcenat , D. Débarre , F. Lefloch

We report conductance and supercurrent measurements for InAs single and parallel double quantum dot Josephson junctions contacted with Nb or NbTiN superconducting electrodes. Large superconducting gap energy, high critical field and large…