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In the Reverse Engineering and Hardware Assurance domain, a majority of the data acquisition is done through electron microscopy techniques such as Scanning Electron Microscopy (SEM). However, unlike its counterparts in optical imaging,…

Image and Video Processing · Electrical Eng. & Systems 2020-04-30 Ronald Wilson , Navid Asadizanjani , Domenic Forte , Damon L. Woodard

The scanning electron microscope (SEM) produces an image of a sample by scanning it with a focused beam of electrons. The electrons interact with the atoms in the sample, which emit secondary electrons that contain information about the…

Computer Vision and Pattern Recognition · Computer Science 2017-09-08 Shahar Tsiper , Or Dicker , Idan Kaizerman , Zeev Zohar , Mordechai Segev , Yonina C. Eldar

The absence of robust segmentation frameworks for noisy liquid phase transmission electron microscopy (LPTEM) videos prevents reliable extraction of particle trajectories, creating a major barrier to quantitative analysis and to connecting…

Computer Vision and Pattern Recognition · Computer Science 2025-11-06 Alexander Wang , Max Xu , Risha Goel , Zain Shabeeb , Isabel Panicker , Vida Jamali

Scanning Electron Microscopy (SEM) is pivotal in revealing intricate micro- and nanoscale features across various research fields. However, obtaining high-resolution SEM images presents challenges, including prolonged scanning durations and…

Image and Video Processing · Electrical Eng. & Systems 2024-10-08 Tom Reclik , Setareh Medghalchi , Philipp Schumacher , Maximilian Wollenweber , Talal Al-Samman , Sandra Korte-Kerzel , Ulrich Kerzel

A growing need exists for efficient and accurate methods for detecting defects in semiconductor materials and devices. These defects can have a detrimental impact on the efficiency of the manufacturing process, because they cause critical…

Computer Vision and Pattern Recognition · Computer Science 2023-08-21 Thibault Lechien , Enrique Dehaerne , Bappaditya Dey , Victor Blanco , Sandip Halder , Stefan De Gendt , Wannes Meert

Extracting high-fidelity 2D contours from Scanning Electron Microscope (SEM) images is critical for calibrating Optical Proximity Correction (OPC) models. While foundation models like Segment Anything 2 (SAM2) are promising, adapting them…

Hardware Architecture · Computer Science 2026-04-21 Da Chen , Guangyu Hu , Kaihong Xu , Kaichao Liang , Songjiang Li , Wei Yang , XiangYu Wen , Mingxuan Yuan

Accurate segmentation and measurement of lithography scanning electron microscope (SEM) images are crucial for ensuring precise process control, optimizing device performance, and advancing semiconductor manufacturing yield. Lithography…

Computer Vision and Pattern Recognition · Computer Science 2025-11-18 Xinyu He , Botong Zhao , Bingbing Li , Shujing Lyu , Jiwei Shen , Yue Lu

Background: The segment-anything model (SAM), introduced in April 2023, shows promise as a benchmark model and a universal solution to segment various natural images. It comes without previously-required re-training or fine-tuning specific…

Image and Video Processing · Electrical Eng. & Systems 2023-05-09 Sheng He , Rina Bao , Jingpeng Li , Jeffrey Stout , Atle Bjornerud , P. Ellen Grant , Yangming Ou

We propose SAMed, a general solution for medical image segmentation. Different from the previous methods, SAMed is built upon the large-scale image segmentation model, Segment Anything Model (SAM), to explore the new research paradigm of…

Computer Vision and Pattern Recognition · Computer Science 2023-10-18 Kaidong Zhang , Dong Liu

Semi-supervised learning (SSL) for medical image segmentation is a challenging yet highly practical task, which reduces reliance on large-scale labeled dataset by leveraging unlabeled samples. Among SSL techniques, the weak-to-strong…

Computer Vision and Pattern Recognition · Computer Science 2024-10-18 Shiao Xie , Hongyi Wang , Ziwei Niu , Hao Sun , Shuyi Ouyang , Yen-Wei Chen , Lanfen Lin

Precision in identifying nanometer-scale device-killer defects is crucial in both semiconductor research and development as well as in production processes. The effectiveness of existing ML-based approaches in this context is largely…

Computer Vision and Pattern Recognition · Computer Science 2024-07-16 Bappaditya Dey , Vic De Ridder , Victor Blanco , Sandip Halder , Bartel Van Waeyenberge

The precise tracking and segmentation of surgical instruments have led to a remarkable enhancement in the efficiency of surgical procedures. However, the challenge lies in achieving accurate segmentation of surgical instruments while…

Image and Video Processing · Electrical Eng. & Systems 2024-08-09 Jieming Yu , Long Bai , Guankun Wang , An Wang , Xiaoxiao Yang , Huxin Gao , Hongliang Ren

In this review, automatic defect inspection algorithms that analyze Scanning Electron Microscopy (SEM) images for Semiconductor Manufacturing (SM) are identified, categorized, and discussed. This is a topic of critical importance for the SM…

Image and Video Processing · Electrical Eng. & Systems 2025-06-02 Enrique Dehaerne , Bappaditya Dey , Victor Blanco , Jesse Davis

Image-based crack detection algorithms are increasingly in demand in infrastructure monitoring, as early detection of cracks is of paramount importance for timely maintenance planning. While deep learning has significantly advanced crack…

Computer Vision and Pattern Recognition · Computer Science 2025-04-22 Ghodsiyeh Rostami , Po-Han Chen , Mahdi S. Hosseini

Integrated silicon photonic devices, which manipulate light to transmit and process information on a silicon-on-insulator chip, are highly sensitive to structural variations. Minor deviations during nanofabrication-the precise process of…

Computer Vision and Pattern Recognition · Computer Science 2024-11-27 Rambod Azimi , Yijian Kong , Dusan Gostimirovic , James J. Clark , Odile Liboiron-Ladouceur

Scanning Electron Microscopy (SEM) is indispensable in modern materials science, enabling high-resolution imaging across a wide range of structural, chemical, and functional investigations. However, SEM imaging remains constrained by…

Under the semi-supervised framework, we propose an end-to-end memory-based segmentation network (MemSeg) to detect surface defects on industrial products. Considering the small intra-class variance of products in the same production line,…

Computer Vision and Pattern Recognition · Computer Science 2022-05-03 Minghui Yang , Peng Wu , Jing Liu , Hui Feng

Medical image segmentation is a critical component in clinical practice, facilitating accurate diagnosis, treatment planning, and disease monitoring. However, existing methods, often tailored to specific modalities or disease types, lack…

Image and Video Processing · Electrical Eng. & Systems 2024-04-02 Jun Ma , Yuting He , Feifei Li , Lin Han , Chenyu You , Bo Wang

Segmenting and recognizing diverse object parts is crucial in computer vision and robotics. Despite significant progress in object segmentation, part-level segmentation remains underexplored due to complex boundaries and scarce annotated…

Computer Vision and Pattern Recognition · Computer Science 2024-07-16 Xinjian Wu , Ruisong Zhang , Jie Qin , Shijie Ma , Cheng-Lin Liu

Semi-supervised learning has attracted much attention due to its less dependence on acquiring abundant annotations from experts compared to fully supervised methods, which is especially important for medical image segmentation which…

Computer Vision and Pattern Recognition · Computer Science 2024-10-24 Yichi Zhang , Jin Yang , Yuchen Liu , Yuan Cheng , Yuan Qi
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