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Quantum bits (qubits) with long coherence times are an important element for the implementation of medium- and large-scale quantum computers. In the case of superconducting planar qubits, understanding and improving qubits' quality can be…

Superconductivity · Physics 2018-11-14 C. T. Earnest , J. H. Béjanin , T. G. McConkey , E. A. Peters , A. Korinek , H. Yuan , M. Mariantoni

This paper presents the fabrication and characterization of superconducting qubit components from titanium nitride (TiN) and aluminum nitride (AlN) layers to create Josephson junctions and superconducting resonators in an all-nitride…

Applied Physics · Physics 2025-08-05 Benedikt Schoof , Moritz Singer , Simon Lang , Harsh Gupta , Daniela Zahn , Johannes Weber , Marc Tornow

We demonstrate impedance-matched low-loss transmission lines with a signal wavelength more than 150 times smaller than the free space wavelength using superconducting nanowires on high permittivity substrates. A niobium nitride thin film is…

Superconducting resonators are widely used in many applications such as qubit readout for quantum computing, and kinetic inductance detectors. These resonators are susceptible to numerous loss and noise mechanisms, especially the…

Superconductivity · Physics 2023-11-30 Tamin Tai , Jingnan Cai , Steven M. Anlage

We have investigated both the temperature and the power dependence of microwave losses for various dielectrics commonly used as substrates for the growth of High critical Temperature Superconductor thin films. We present measurement of…

Superconductivity · Physics 2014-03-11 Marco Arzeo , Floriana Lombardi , Thilo Bauch

We have investigated the correlation between the microwave loss and patterning method for coplanar waveguide titanium nitride resonators fabricated on Si wafers. Three different methods were investigated: fluorine- and chlorine-based…

The interplay between substrates and superconducting thin films has attracted increasing attention. Here, we report an in-depth investigation on superconducting properties of the epitaxial TiN thin films grown on three different substrates…

Superconductivity · Physics 2025-01-27 Yixin Liu , Yuchuan Liu , Zulei Xu , Aobo Yu , Xiaoni Wang , Wei Peng , Yu Wu , Gang Mu , Zhi-Rong Lin

Superconducting coplanar waveguide (SCPW) resonators, key components for quantum computing and sensing applications, require a high internal quality factor (Qi) for effective qubit readout and quantum sensing applications. Minimizing…

Superconductivity · Physics 2025-09-03 Bongkeon Kim , Yong-Joo Doh

Results on the chemical composition, structure and growth kinetics of titanium nitride (TiN) films deposited on mild steel substrates by pyrolytic laser-induced chemical vapour deposition (LCVD) are presented. Golden coloured lines of TiN…

Materials Science · Physics 2007-05-23 A. J. Silvestre , O. Conde

Silicon nitride (SiN) has emerged as a popular platform for nonlinear photonics due to its large bandgap, relatively large nonlinear index of refraction, and high degree of CMOS-compatibility. Nonlinear optical processes in microresonators…

Optics · Physics 2025-11-05 Lala Rukh , Gabriel M. Colación , Franco H. Buck , Tara E. Drake

We systematically study the performance of compact lumped element planar microwave $\mathrm{Nb_{70}Ti_{30}N}$ (NbTiN) resonators operating at 5 GHz in external in-plane magnetic fields up to 440 mT, a broad temperature regime from 2.2 K up…

A combinatorial thin-film synthesis approach combined with a high throughput analysis methodology was successfully applied to synthesize TiN/Ni coatings with optimum mechanical properties. The synthesis approach consists of the deposition…

An ultrabroad absorber based on double-ring-shaped titanium nitride (TiN) nanoresonators, which can work in high temperatures, is proposed and numerically studied. The absorber with some optimal parameters exhibits an averaged absorption of…

Optics · Physics 2021-02-03 Shun Cao , Yi Jin , Hongguang Dong , Tingbiao Guo , Zhenchao Liu , Jinlong He , Sailing He

Measuring the internal quality factor of coplanar waveguide superconducting resonators is an established method of determining small losses in superconducting devices. Traditionally, the resonator losses are only attributed to two-level…

Quantum Physics · Physics 2025-07-25 Ashish Alexander , Christopher G. Weddle , Christopher J. K. Richardson

Superconducting coplanar waveguide (SCPW) resonators with high internal quality factors (\Q_i) are essential for quantum information applications, but suffer severe Qi degradation under magnetic fields due to quasiparticle generation and…

Superconductivity · Physics 2025-09-26 Bongkeon Kim , Chang Geun Yu , Priyanath Mal , Yong-Joo Doh

Our study shows that deposited Ge and Si dielectric thin-films can exhibit low microwave losses at near single-photon powers and sub-Kelvin temperatures ($\approx$40 mK). This low loss enables their use in a wide range of devices, including…

Nanophotonic devices offer an unprecedented ability to concentrate light into small volumes which can greatly increase nonlinear effects. However, traditional plasmonic materials suffer from low damage thresholds and are not compatible with…

We apply the superconducting proximity effect in TiN/Ti multi-layer films to tune the critical temperature, Tc, to within 10 mK with high uniformity (less than 15 mK spread) across a 75 mm wafer. Reproducible Tc's are obtained from 0.8 -…

We have studied Nb lambda/2 coplanar-waveguide (CPW) resonators whose resonant frequencies are 10-11 GHz. The resonators have different film thicknesses, t=0.05, 0.1, 0.2, and 0.3 um. We measured at low temperatures, T=0.02-5 K, one of the…

Superconductivity · Physics 2009-11-25 Kunihiro Inomata , Tsuyoshi Yamamoto , Michio Watanabe , Kazuaki Matsuba , Jaw-Shen Tsai

Aluminium based platforms have allowed to reach major milestones for superconducting quantum circuits. For the next generation of devices, materials that are able to maintain low microwave losses while providing new functionalities, such as…

Other Condensed Matter · Physics 2022-05-03 Kazi Rafsanjani Amin , Carine Ladner , Guillaume Jourdan , Sebastien Hentz , Nicolas Roch , Julien Renard