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Radiofrequency (RF) front ends for current and next generation (5G and 6G) wireless communication demand acoustic filters that combine wide bandwidth, high power capability, and thermal stability. Existing surface and bulk acoustic wave…
High overtone bulk acoustic resonators are essential components in microwave signal processing and emerging quantum technologies; however, conventional designs suffer from limited impedance matching, spurious mode interference, and…
Solid-state quantum acoustodynamic (QAD) systems provide a compact platform for quantum information storage and processing by coupling acoustic phonon sources with superconducting or spin qubits. The multi-mode composite high-overtone bulk…
This work presents the demonstration of lattice filters based on laterally excited bulk acoustic resonators (XBARs). Two filter implementations, namely direct lattice and layout-balanced lattice topologies, are designed and fabricated in…
Microwave frequency acousto-optic modulation is realized by exciting high overtone bulk acoustic wave resonances (HBAR resonances) in the photonic stack. These confined mechanical stress waves transmit exhibit vertically transmitting, high…
A high-overtone bulk acoustic resonator (HBAR), in which a piezoelectric transducer is set on an acoustic cavity, has been attracting attention in both fundamental research and RF applications due to its scalability, high frequency, and…
This letter presents the experimental demonstration of a film bulk acoustic resonator (FBAR) circulator at 2.5 GHz. The circulator is based on spatio-temporal modulation of the series resonant frequency of FBARs using varactors and exhibits…
We generalize the two-dimensional scalar differential equations for the thickness-extensional operating modes of thin film bulk acoustic wave resonators (FBARs) to include the effects of surface impedance so that the equations can be used…
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at 12.5 GHz with high electromechanical coupling (k2) of 9.5% and quality factor (Q) of 208, resulting in a figure of merit (FoM, Qk2)…
Phonon modes at microwave frequencies can be cooled to their quantum ground state using conventional cryogenic refrigeration, providing a convenient way to study and manipulate quantum states at the single phonon level. Phonons are of…
This work reports on the modeling, fabrication, and experimental characterization of a 13 GHz 30% Scandium-doped Aluminum Nitride (ScAlN) Overmoded Bulk Acoustic Resonator (OBAR) for high-frequency Radio Frequency (RF) applications, notably…
High-overtone bulk acoustic wave resonators (HBARs) promise advanced phononics, yet achieving nonlinearity remains challenging. We demonstrate a radiation-pressure-type parametric interaction between GHz HBARs and low-frequency flexural…
In this work, Laterally excited Bulk Acoustic Wave (LBAW) resonators on X-cut Lithium Niobate (LiNbO3) and, for the first time their higher-order overtones (LOBAW) are demonstrated by embedding interdigitated electrodes recessed into the…
This letter presents miniature millimeter wave (mmWave, above 30 GHz) acoustic resonators based on a single-layer thin-film lithium niobate (LN) platform. More specifically, we present high performance third-order antisymmetric (A3) mode…
Surface-acoustic-wave (SAW) resonators are a promising platform for constructing hybrid quantum systems, where confined acoustic waves enable strong interaction with various physical systems. Focusing SAW resonators, reducing mode volume…
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (Pt) electrodes. FBARs with combinations of Pt and aluminum…
High-fidelity quantum optomechanical control of a mechanical oscillator requires the ability to perform efficient, low-noise operations on long-lived phononic excitations. Microfabricated high-overtone bulk acoustic wave resonators…
This article presents an approach to control the operating frequency and fractional bandwidth (FBW) of miniature acoustic filters in thin-film lithium niobate (TFLN). More specifically, we used first-order antisymmetric (A1) mode…
Suspended high-overtone bulk acoustic wave resonators (HBARs) can serve as a viable optomechanical platform for efficient transduction of signals from the microwave to the optical frequency domain. In contrast to 1D nanobeam optomechanical…
Surface acoustic wave (SAW) devices are widely used in sensing and biosensing but generally suffer from strong attenuation in liquid environments. Conventional approaches rely on reflectors to reduce these losses, yet these components…