Related papers: A Liquid Density Sensor Based On AlN Piezoelectric…
We demonstrate the design, fabrication and use of a dual electrode PMUT (Piezoelectric Micromachined Ultrasound Transducer) integrated with a microfluidic channel as a fluid density sensor in both static and dynamic density-change…
This paper reports an aluminum nitride (AlN) multi-frequency piezoelectric micromachined ultrasound transducers (MF-PMUT) array for photoacoustic (PA) imaging, where the broadened bandwidth is beneficial to improve imaging resolution.…
We present fabrication of 570-um-thick, millimeter-sized soda-lime-silicate float glass blocks with a 1-um-thick AlN-thin-film piezoelectric transducer sandwiched between thin metallic electrodes and deposited on the top surface. The…
We demonstrate a suspended thin-film aluminum nitride (AlN) microbolometer for narrowband very long-wave infrared detection. The device uses a 100-nm-thick AlN membrane suspended above a Pt back reflector by a 1-um air gap. Resonant…
This report introduces a novel optofluidic platform based on piezo-MEMS technology, capable of identifying subtle variations in the fluid concentration. The system utilizes piezoelectric micromachined ultrasound transducers (PMUTs) as…
We describe the application of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. In these experiments, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh vacuum…
Correct measurement of the shell properties of coated microbubbles (MBs) is essential to understanding and optimizing their response to ultrasound (US) exposure parameters in diagnostic and therapeutic ultrasound. MBs are surrounded by…
AlN is an ultra-wide bandgap semiconductor which has been developed for applications including power electronics and optoelectronics. Thermal management of these applications is the key for stable device performance and allowing for long…
Continuous monitoring of voltages ranging from tens to hundreds of kV over environmental conditions, such as temperature, is of great interest in power grid applications. This is typically done via instrument transformers. These…
This paper presents an analytical design of an ultrasonic power transfer system based on piezoelectric micro-machined ultrasonic transducer (PMUT) for fully wireless brain implants in mice. The key steps like the material selection of each…
In this paper, we report the development of an intensity modulated fiber optic sensor for angular displacement measurement. This sensor was designed to present high sensitivity, linear response, wide bandwidth and, furthermore, to be simple…
This paper details the development of high-quality, c-axis oriented AlN thin films up to 2 {\mu}m thick, using sputtering on platinum-coated SOI substrates for use in piezoelectric MEMS. Our comprehensive studies illustrate how important…
This paper presents a highly sensitive microwave sensor for dielectric sensing. One of the main disadvantages of microwave resonant-based sensors is cross-sensitivity originated by time-dependent uncontrolled environmental factors such as…
A preconcentrating surface-enhanced Raman scattering (SERS) sensor for the analysis of liquid-soaked tissue, tiny liquid droplets and thin liquid films without the necessity to collect the analyte is reported. The SERS sensor is based on a…
We report on the direct measurement of two-dimensional sheet charge density dependence of electron transport in AlGaN/GaN high electron mobility transistors. Pulsed IV measurements established increasing electron velocities with decreasing…
This paper investigates the performance of the micro-electro-mechanical systems resonant sensor used for particle detection and concentration measurement. These fine and ultra-fine particles such as particulate matter (PM), ferrous…
The aim of a joint research and development project at the BME and HWU is to produce a cheap, reliable, low-power and CMOS-MEMS process compatible capacitive type relative humidity (RH) sensor that can be incorporated into a…
This paper presents the design, fabrication and preliminary experimental results of a flexure plate wave (FPW) resonator using sol-gel derived lead zirconate titanates (PZT) thin films. The resonator adopts a two-port structure with…
The recent development of opto-mechano-fluidic resonators has provided -- by harnessing photon radiation pressure -- a new microfluidics platform for the optical sensing of fluid density and bulk modulus. Here we show that fluid viscosity…
We report on a novel flow-based method for high-precision chemical detection that integrates quantum sensing with droplet microfluidics. We deploy nanodiamond particles hosting fluorescent nitrogen vacancy defects as quantum sensors in…