Related papers: Resolving Complex Subwavelength Grating Structures…
Unprecedented atomic-scale measurement resolution has recently been demonstrated in single-shot optical localization metrology based on deep-learning analyses of diffraction patterns of topologically structured light scattered from objects.…
In recent years, there has been a mounting interest in better methods of measuring nanoscale objects, especially in fields such as nanotechnology, biomedicine, cleantech, and microelectronics. Conventional methods have proved insufficient,…
We present an optical metrology system for characterization of topography of micro/nano-structures on a surface or embedded in a semi-transparent material. Based on the principles of scatterometry, where the intensity of scattered light is…
The investigation into the scattering of plane waves by a periodic array of parallel cylinders utilizes the method of cylindrical wave decomposition, thereby reducing the problem complexity to a series of linear algebraic equations. This…
Increasing the light scattering efficiency of nanostructured materials is becoming an active field of research both in fundamental science and commercial applications. In this context, the challenge is to use inexpensive organic materials…
Light scattering is one of the most established wave phenomena in optics, lying at the heart of light-matter interactions and of crucial importance for nanophotonic applications. Passivity, causality and energy conservation imply strict…
We propose a scheme for detecting and differentiating deeply subwavelength particles based on their spatial features. Our approach combines scattering from an ultrasonically modulated nanopatterend grating with heterodyne techniques to…
Scatterometry is a tested method for measuring periodic semiconductor structures. Since the sizes of modern semiconductor structures have reached the nanoscale regime, the challenge is to determine the shape of periodic nanostructures with…
Conventional surface-relief gratings are inefficient at deflecting normally-incident light by large angles. This constrains their use in many applications and limits the overall efficiency of any optical instrument integrating gratings.…
The wavefront is scrambled when coherent light propagates through a random scattering medium and which makes direct use of the conventional optical methods ineffective. In this paper, we propose and demonstrate a structured light…
Artificial nanostructures with ultrafine and deep-subwavelength feature sizes have emerged as a paradigm-shifting platform to advanced light field management, becoming a key building block for high-performance integrated optoelectronics and…
Subwavelength gratings, with period shorter than the incident wavelength, have garnered significant attention in the fields of photonics, optoelectronics, and image sensor technology. In this research, we delve into the scattering…
Modelling the scattering of focused, coherent light by nano-scale structures is oftentimes used to reconstruct or infer geometrical or material properties of structures under investigation in optical scatterometry. This comprises both…
Grating spectra exhibit sharp variations of the scattered light, known as grating anomalies. The latter are due to resonances that have fascinated specialists of optics and physics for decades and are nowadays used in many applications. We…
Light scattering in disordered media has been studied extensively due to its prevalence in natural and artificial systems [1]. In the field of photonics most of the research has focused on understanding and mitigating the effects of…
Grating magneto-optical traps are an enabling quantum technology for portable metrological devices with ultracold atoms. However, beam diffraction efficiency and angle are affected by wavelength, creating a single-optic design challenge for…
Arrays of nanoparticles exploited in light scattering applications commonly only feature either a periodic or a rather random arrangement of its constituents. For the periodic case, light scattering is mostly governed by the strong spatial…
Thick biological tissues give rise to not only the scattering of incoming light waves, but also aberrations of the remaining unscattered waves. Due to the inability of existing optical imaging methodologies to overcome both of these…
This paper addresses the reconstruction of periodic structures using phase or phaseless near-field measurements. We introduce a novel illumination strategy based on the quasi-periodic condition. Employing the Dirichlet-to-Neumann (DtN) map,…
A topology optimization method is presented and applied to a blazed diffraction grating in reflection under conical incidence. This type of gratings is meant to disperse the incident light on one particular diffraction order and this…