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To improve transistor density and electronic performance, next-generation semiconductor devices are adopting three-dimensional architectures and feature sizes down to the few-nm regime, which require atomic-scale metrology to identify and…

Phase reconstruction is important in transmission electron microscopy for structural studies. We describe electron Fourier ptychography and its application to phase reconstruction of both radiation-resistant and beam-sensitive materials. We…

Microstructure characterisation has been greatly enhanced through the use of electron backscatter diffraction (EBSD), where rich maps are generated through analysis of the crystal phase and orientation in the scanning electron microscope…

Materials Science · Physics 2018-11-15 Vivian S Tong , Alexander J Knowles , David Dye , T Ben Britton

Spatial confinement of matter in functional nanostructures has propelled these systems to the forefront of nanoscience, both as a playground for exotic physics and quantum phenomena and in multiple applications including plasmonics,…

In a scanning transmission electron microscope (STEM), producing a high-resolution image generally requires an electron beam focused to the smallest point possible. However, the magnetic lenses used to focus the beam are unavoidably…

Progress in electron-beam spectroscopies has recently enabled the study of optical excitations with combined space, energy and time resolution in the nanometer, millielectronvolt and femtosecond domain, thus providing unique access into…

Optics · Physics 2019-11-13 Albert Polman , Mathieu Kociak , F. Javier García de Abajo

Scanning transmission electron microscopy (STEM) allows for imaging, diffraction, and spectroscopy of materials on length scales ranging from microns to atoms. By using a high-speed, direct electron detector, it is now possible to record a…

A detailed analysis of ptychography for 3D phase reconstructions of thick specimens is performed. We introduce multi-focus ptychography, which incorporates a 4D-STEM defocus series to enhance the quality of 3D reconstructions along the beam…

Precession of a converged beam during acquisition of a 4D-STEM dataset improves strain, orientation, and phase mapping accuracy by averaging over continuous angles of illumination. Precession experiments usually rely on integrated systems,…

Instrumentation and Detectors · Physics 2025-10-20 Stephanie M. Ribet , Rohan Dhall , Colin Ophus , Karen C. Bustillo

This comprehensive review discusses the development of scanning electron microscopy and the application of this technology in different fields such as biology, nanobiotechnology and biomedical science. Besides being a tool for high…

Quantitative Methods · Quantitative Biology 2023-11-02 Aniruddha Acharya

The concept of compressive sensing was recently proposed to significantly reduce the electron dose in scanning transmission electron microscopy (STEM) while still maintaining the main features in the image. Here, an experimental setup based…

Instrumentation and Detectors · Physics 2016-03-23 Armand Béché , Bart Goris , Bert Freitag , Jo Verbeeck

Four dimensional scanning transmission electron microscopy (4D STEM) records the scattering of electrons in a material in great detail. The benefits offered by 4D STEM are substantial, with the wealth of data it provides facilitating for…

Instrumentation and Detectors · Physics 2021-12-09 Daen Jannis , Christoph Hofer , Chuang Gao , Xiaobin Xie , Armand Béché , Timothy J. Pennycook , Jo Verbeeck

High energy electron beams can now be routinely focused to 1-2 {\AA} and offer the ability to obtain vibrational information from materials using monochromated electron energy-loss spectroscopy (EELS) in a scanning transmission electron…

Materials Science · Physics 2021-07-13 Kartik Venkatraman , Peter A. Crozier

Aberration-corrected environmental transmission electron microscopy (ETEM) enables atomic-resolution imaging of dynamic catalytic processes. Correlating atomic-scale structural changes with reaction products detected by mass spectrometry…

Orientation dependent electronic properties of wurtzite zinc oxide nanorods are characterized by aloof beam electron energy-loss spectroscopy (EELS) carried out in a scanning transmission electron microscope (STEM). The two key crystal…

Materials Science · Physics 2021-10-06 Yao-Wen Yeh , Sobhit Singh , David Vanderbilt , Philip E. Batson

In scanning electron microscopy, the achievable image quality is often limited by a maximum feasible acquisition time per dataset. Particularly with regard to three-dimensional or large field-of-view imaging, a compromise must be found…

Computer Vision and Pattern Recognition · Computer Science 2018-01-15 Patrick Trampert , Faysal Bourghorbel , Pavel Potocek , Maurice Peemen , Christian Schlinkmann , Tim Dahmen , Philipp Slusallek

SPECT (Single-photon Emission Computerized Tomography) and PET (Positron Emission Tomography) are essential medical imaging tools, for which the sampling angle number, scan time should be chosen carefully to compromise between image quality…

Medical Physics · Physics 2015-06-16 Xiaolin Zhou , Minkai Yun , Xuexiang Cao , Shuangquan Liu , Lu Wang , Xianchao Huang , Long Wei

Real-space imaging of three-dimensional atomic structures is a critical yet challenging task in materials science. Although scanning transmission electron microscopy has achieved sub-angstrom lateral resolution through techniques like…

Time-resolved and ultrafast electron energy-loss spectroscopy (EELS) is an emerging technique for measuring photoexcited carriers, lattice dynamics, and near-fields across femtosecond to microsecond timescales. When performed in either a…

Materials Science · Physics 2025-11-03 Wonseok Lee , Levi D. Palmer , Thomas E. Gage , Scott K. Cushing

Photonic neural networks offer a promising alternative to traditional electronic systems for machine learning accelerators due to their low latency and energy efficiency. However, the challenge of implementing the backpropagation algorithm…

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