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We present results of a fabrication-process development for the lithographic pattern transfer into the sub-100nm range by combining electron-beam lithography and reactive dry etching to obtain high quality niobium-based light-sensitive…

Mesoscale and Nanoscale Physics · Physics 2010-11-23 H. Bartolf , K. Inderbitzin , L. B. Gómez , A. Engel , A. Schilling , H. -W. Hübers , A. Semenov , K. Il'in , M. Siegel

Superconducting qubits based on Al/AlOx/Al Josephson junction are one of the most promising candidates for the physical implementation of universal quantum computers. Due to scalability and compatibility with the state-of-the-art…

Nanofabrication of topological insulator (TI) devices is essential for accessing edge and interface states, but conventional lithography and etching compromise the atomically clean surfaces required for scanning tunneling microscopy and…

Materials Science · Physics 2025-09-24 Adrian Greichgauer , Roozbeh Yazdanpanah , Alexey Taskin , Oliver Breunig , Yoichi Ando , Jens Brede

The microwave-driven dynamics of the superconducting phase difference across a Josephson junction is now widely employed in superconducting qubits and quantum circuits. With the typical energy level separation frequency of several GHz,…

High-fidelity, efficient quantum nondemolition readout of quantum bits is integral to the goal of quantum computation. As superconducting circuits approach the requirements of scalable, universal fault tolerance, qubit readout must also…

The continuous development of superconducting electronics is encouraging several studies on hybrid Josephson junctions (JJs) based on superconductor/ferromagnet/superconductor (SFS) heterostructures, as either spintronic devices or…

Superconductivity · Physics 2020-01-20 H. G. Ahmad , R. Caruso , A. Pal , G. Rotoli , G. P. Pepe , M. G. Blamire , F. Tafuri , D. Massarotti

We fabricated small-size stacks on the surface of Bi$_2$Sr$_2$CaCu$_2$O$_{8+x}$ (BSCCO-2212) single crystals with the bulk transition temperature $T_c$$\simeq$90 K, each containing a few intrinsic Josephson junctions. Below a critical…

Superconductivity · Physics 2009-10-31 Nam Kim , Yong Joo Doh , Hyun-Sik Chang , Hu-Jong Lee

High-temperature cuprate superconductors-based van der Waals (vdW) heterostructures hold high technological promise. One of the obstacles hindering progress is the detrimental effect of disorder on the properties of Josephson junctions (JJ)…

Reproducible High Tc Josephson junctions have been made in a rather simple two-step process using ion irradiation. A microbridge 1 to 5 micrometers wide is firstly designed by ion irradiating a c-axis-oriented YBa2Cu3O7 film through a gold…

Spectroscopy is a powerful tool to probe physical, chemical, and biological systems. Recent advances in microfabrication have introduced novel, intriguing mesoscopic quantum systems including superconductor-semiconductor hybrid devices and…

Mesoscale and Nanoscale Physics · Physics 2021-11-04 J. Griesmar , R. H. Rodriguez , V. Benzoni , J. -D. Pillet , J. -L. Smirr , F. Lafont , Ç. Ö. Girit

High quality, ultrathin, superconducting films are required for advanced devices such as hot-electron bolometers, superconducting nanowire single photon detectors, and quantum applications. Using Hybrid Physical-Chemical Vapor Deposition…

The scaleup of quantum computers operating in the microwave domain requires advanced control electronics, and the use of integrated components that operate at the temperature of the quantum devices is potentially beneficial. However, such…

Improving the coherence of superconducting qubits is a fundamental step towards the realization of fault-tolerant quantum computation. However, coherence times of quantum circuits made from conventional aluminium-based Josephson junctions…

Quantum processors using superconducting qubits suffer from dielectric loss leading to noise and dissipation. Qubits are usually designed as large capacitor pads connected to a non-linear Josephson junction (or SQUID) by a superconducting…

Macroscopic and robust supercurrents are observed by direct electron transport measurements on a silicon surface reconstruction with In adatoms (Si(111)-(R7xR3)-In). The superconducting transition manifests itself as an emergence of the…

Mesoscale and Nanoscale Physics · Physics 2015-05-28 Takashi Uchihashi , Puneet Mishra , Masakazu Aono , Tomonobu Nakayama

We investigate Magnetic Josephson Junction (MJJ) - a superconducting device with ferromagnetic barrier for a scalable high-density cryogenic memory compatible with energy-efficient single flux quantum (SFQ) circuits. The…

We have prepared meta-atoms based on radio frequency superconducting quantum interference devices (RF SQUIDs) and examined their tunability with dc magnetic field, rf current, and temperature. RF SQUIDs are superconducting split ring…

Superconductivity · Physics 2013-12-24 M. Trepanier , Daimeng Zhang , Oleg Mukhanov , Steven M. Anlage

We investigate a photolithography-only fabrication process for transmon Josephson junctions using a modified double-oblique evaporation geometry. Using a bilayer resist process and Al shadow evaporation, we fabricate junction structures and…

Quantum Physics · Physics 2026-05-20 K. Aoyanagi , S. Abe , S. Chen , T. Inada , C. Kawai , Y. Mino , K. Nakamura , K. Nakazono , T. Nitta , K. Watanabe

Josephson junction spectroscopy is a powerful local microwave spectroscopy technique that has promising potential as a diagnostic tool to probe the microscopic origins of noise in superconducting qubits. We present advancements toward…

Josephson junctions (JJs) are the key element of many devices operating at cryogenic temperatures. Development of time-efficient wafer-scale JJ characterization for process optimization and control of JJ fabrication is essential. Such…