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Semiconductor manufacturing is an extremely complex and precision-driven process, characterized by thousands of interdependent parameters collected across diverse tools and process steps. Multi-variate time-series analysis has emerged as a…

Multivariate time series (MTS) anomaly detection identifies abnormal patterns where each timestamp contains multiple variables. Existing MTS anomaly detection methods fall into three categories: reconstruction-based, prediction-based, and…

Accurate detection and diagnosis of abnormal behaviors such as network attacks from multivariate time series (MTS) are crucial for ensuring the stable and effective operation of industrial cyber-physical systems (CPS). However, existing…

Anomalies represent deviations from the intended system operation and can lead to decreased efficiency as well as partial or complete system failure. As the causes of anomalies are often unknown due to complex system dynamics, efficient…

Time series anomaly detection plays a critical role in automated monitoring systems. Most previous deep learning efforts related to time series anomaly detection were based on recurrent neural networks (RNN). In this paper, we propose a…

With the growing complexity of Cyber-Physical Systems (CPS) and the integration of Internet of Things (IoT), the use of sensors for online monitoring generates large volume of multivariate time series (MTS) data. Consequently, the need for…

Quantum-inspired tensor networks algorithms have shown to be effective and efficient models for machine learning tasks, including anomaly detection. Here, we propose a highly parallelizable quantum-inspired approach which we call SMT-AD…

Multivariate time series (MTS) data are becoming increasingly ubiquitous in diverse domains, e.g., IoT systems, health informatics, and 5G networks. To obtain an effective representation of MTS data, it is not only essential to consider…

Anomaly detection in complex industrial processes plays a pivotal role in ensuring efficient, stable, and secure operation. Existing anomaly detection methods primarily focus on analyzing dominant anomalies using the process variables (such…

It is hard to collect enough flaw images for training deep learning network in industrial production. Therefore, existing industrial anomaly detection methods prefer to use CNN-based unsupervised detection and localization network to…

Anomaly detection in multivariate time series (MTS) is crucial for various applications in data mining and industry. Current industrial methods typically approach anomaly detection as an unsupervised learning task, aiming to identify…

Smart manufacturing systems are being deployed at a growing rate because of their ability to interpret a wide variety of sensed information and act on the knowledge gleaned from system observations. In many cases, the principal goal of the…

Network or physical attacks on industrial equipment or computer systems may cause massive losses. Therefore, a quick and accurate anomaly detection (AD) based on monitoring data, especially the multivariate time-series (MTS) data, is of…

We present a unified experiment, analysis, and benchmark study of multivariate time-series (MTS) anomaly detection. Ten family-representative detectors -- spanning statistical, reconstruction, association, frequency, and generic-transformer…

As a substantial amount of multivariate time series data is being produced by the complex systems in Smart Manufacturing, improved anomaly detection frameworks are needed to reduce the operational risks and the monitoring burden placed on…

Multivariate time series (MTS) anomaly detection commonly encounters in various domains like finance, healthcare, and industrial monitoring. However, existing MTS anomaly detection methods are mostly defined on the static graph structure,…

Anomaly detection in multivariate time series (MTS) has been widely studied in one-class classification (OCC) setting. The training samples in OCC are assumed to be normal, which is difficult to guarantee in practical situations. Such a…

Anomaly detection of time series, especially multivariate time series(time series with multiple sensors), has been focused on for several years. Though existing method has achieved great progress, there are several challenging problems to…

Multivariate Time Series (MTS) anomaly detection focuses on pinpointing samples that diverge from standard operational patterns, which is crucial for ensuring the safety and security of industrial applications. The primary challenge in this…

Multivariate time series (MTS) anomaly detection is essential for maintaining the reliability of industrial systems, yet real-world deployment is hindered by two critical challenges: training data contamination (noises and hidden anomalies)…