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Focused electron beam induced deposition (FEBID) is a powerful technique for 3D-printing of complex nanodevices. However, for resolutions below 10 nm, it struggles to control size, morphology and composition of the structures, due to a lack…

This paper presents a detailed computational protocol for atomistic simulation of the formation and growth of metal-containing nanostructures during the Focused Electron Beam Induced Deposition (FEBID) process. The protocol is based upon…

Chemical Physics · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady B. Sushko , Andrey V. Solov'yov

Recent advances in nanotechnology have created the need to manufacture three-dimensional nanostructures with controlled material composition. Focused Electron Beam Induced Deposition (FEBID) is a nanoprinting technique offering highest…

Mesoscale and Nanoscale Physics · Physics 2025-09-30 Jakub Jurczyk , Leo Brockhuis , Amalio Fernández-Pacheco , Ivo Utke

Focused electron beam induced deposition (FEBID) is a direct-write method for the fabrication of nanostructures whose lateral resolution rivals that of advanced electron lithography but is in addition capable of creating complex…

Mesoscale and Nanoscale Physics · Physics 2020-02-24 Michael Huth , Fabrizio Porrati , Oleksandr V. Dobrovolskiy

Irradiation-driven fragmentation and chemical transformations of organometallic molecules play a central role in nanofabrication techniques based on the use of focused charged-particle beams. In this paper, the electron irradiation-induced…

Atomic and Molecular Clusters · Physics 2026-03-27 Soumyo Kheto , Alexey Verkhovtsev , Bobby Antony , Andrey V. Solov'yov

The growth of iron-containing nanostructures in the process of focused electron beam-induced deposition (FEBID) of Fe(CO)$_5$ is studied by means of atomistic irradiation-driven molecular dynamics (IDMD) simulations. The geometrical…

Materials Science · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady Sushko , Andrey V. Solov'yov

The fabrication of three-dimensional (3D) nanostructures is of great interest to many areas of nanotechnology currently challenged by fundamental limitations of conventional lithography. One of the most promising direct-write methods for 3D…

Mesoscale and Nanoscale Physics · Physics 2020-01-07 L. Skoric , D. Sanz-Hernández , F. Meng , C. Donnelly , S. Merino-Aceituno , A. Fernández-Pacheco

Focused electron beam induced deposition (FEBID) is an additive manufacturing technique uniquely suited for fabricating nanoscale 3D prototypes for a range of applications, including spintronic devices. However, the variation of growth…

Mesoscale and Nanoscale Physics · Physics 2026-05-15 Aurys Silinga , Keir Edgar , Stephen McVitie , Kayla Fallon , András Kovács , Rafal E. Dunin-Borkowski , Trevor P. Almeida

The role of thermal effects in the focused electron beam induced deposition (FEBID) process of Me$_2$Au(tfac) is studied by means of irradiation-driven molecular dynamics simulations. The FEBID of Me$_2$Au(tfac), a commonly used precursor…

Materials Science · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady Sushko , Andrey V. Solov'yov

The stochastic dynamics of small elastic objects in fluid are central to many important and emerging technologies. It is now possible to measure and use the higher modes of motion of elastic structures when driven by Brownian motion alone.…

Fluid Dynamics · Physics 2024-12-17 J. Barbish , M. R. Paul

We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron…

The development of modern metal deposition techniques like Focused Ion/Electron Beam Induced Deposition FIBID/FEBID relies heavily on the availability of metal-organic precursors of particular properties. To create a new precursor,…

Mesoscale and Nanoscale Physics · Physics 2025-11-06 Benedykt R. Jany , Katarzyna Madajska , Aleksandra Butrymowicz-Kubiak , Franciszek Krok , Iwona B. Szymańska

In this work we develop the Spectral Ewald Accelerated Stokesian Dynamics (SEASD), a novel computational method for dynamic simulations of polydisperse colloidal suspensions with full hydrodynamic interactions. SEASD is based on the…

Computational Physics · Physics 2016-01-20 Mu Wang , John F. Brady

The focused ion beam (FIB) microscope is well established as a high-resolution machining instrument capable of site-selectively removing material down to the nanoscale. Beyond subtractive processing, however, the FIB can also add material…

Materials Science · Physics 2025-10-07 Frances Isabel Allen

Simulations of SiC crystal growth using molecular dynamics (MD) have become popular in recent years. They, however, simulate very fast deposition rates, to reduce computational costs. Therefore, they are more akin to surface sputtering,…

Materials Science · Physics 2025-12-25 Alexander Reichmann , Zahra Rajabzadeh , Sebastian Hofer , René Hammer , Lorenz Romaner

The present paper intends to be a new study of a widely used precursor in nanostructure deposition and FEBID processes with a focus on its fragmentation at collisions with low-energy electrons. Newer developments in nanotechnology with…

Materials Science · Physics 2022-09-28 Maria Pintea , Nigel Mason , Maria Tudorovskaya

We present a numerical investigation of energy and charge distributions during electron-beam-induced growth of W nanostructures on SiO2 substrates using Monte Carlo simulation of electron transport. This study gives a quantitative insight…

Mesoscale and Nanoscale Physics · Physics 2013-11-26 Francesc Salvat-Pujol , Harald O. Jeschke , Roser Valenti

We construct a reduced, data-driven, parameter dependent effective Stochastic Differential Equation (eSDE) for electric-field mediated colloidal crystallization using data obtained from Brownian Dynamics Simulations. We use Diffusion Maps…

Fast and accurate simulation of dynamical systems is a fundamental challenge across scientific and engineering domains. Traditional numerical integrators often face a trade-off between accuracy and computational efficiency, while existing…

Computational Engineering, Finance, and Science · Computer Science 2026-03-06 Jiaxin Yuan , Haizhao Yang , Maria Cameron

Smoothed Dissipative Particle Dynamics (SDPD) is a mesoscopic method which allows to select the level of resolution at which a fluid is simulated. The aim of this work is to extend SDPD to chemically reactive systems.To this end, an…

Fluid Dynamics · Physics 2017-09-13 Gérôme Faure , Jean-Bernard Maillet
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