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Scanning transmission electron microscopy (STEM) has become a cornerstone instrument for semiconductor materials metrology, enabling nanoscale analysis of complex multilayer structures that define device performance. Developing effective…

High-resolution transmission electron microscopy (HRTEM) is crucial for observing material's structural and morphological evolution at Angstrom scales, but the electron beam can alter these processes. Devices such as CMOS-based…

Materials Science · Physics 2025-12-04 Brian Lee , Meng Li , Judith C Yang , Dmitri N Zakharov , Xiaohui Qu

Accurately determining the crystallographic structure of a material, organic or inorganic, is a critical primary step in material development and analysis. The most common practices involve analysis of diffraction patterns produced in…

Lattice strain measurement of nanoscale semiconductor devices is crucial for the semiconductor industry as strain substantially improves the electrical performance of transistors. High resolution scanning transmission electron microscopy…

Twisted 2D material heterostructures provide an exciting platform for investigating new fundamental physical phenomena. Many of the most interesting behaviours emerge at small twist angles, where the materials reconstruct to form areas of…

Defects in crystalline materials control the properties of materials, and their characterization focuses our strategies to optimize performance. Electron microscopy has served as the backbone of our understanding of defect structure and…

Materials Science · Physics 2019-03-19 Daniel S. Gianola , T. Ben Britton , Stefan Zaefferer

Momentum-resolved scanning transmission electron microscopy (MRSTEM) is a powerful phase-contrast technique that can map lateral magnetic and electric fields ranging from the micrometer to the subatomic scale. Resolving fields ranging from…

The reduced dimensionality in two-dimensional materials leads a wealth of unusual properties, which are currently explored for both fundamental and applied sciences. In order to study the crystal structure, edge states, the formation of…

Mesoscale and Nanoscale Physics · Physics 2021-01-04 Felix Kern , Martin Linck , Daniel Wolf , Nasim Alem , Himani Arora , Sibylle Gemming , Artur Erbe , Alex Zettl , Bernd Büchner , Axel Lubk

High-Resolution Transmission Electron Microscopy (HRTEM) enables atomic-scale observation of nucleation dynamics, which boosts the studies of advanced solid materials. Nonetheless, due to the millisecond-scale rapid change of nucleation, it…

Computer Vision and Pattern Recognition · Computer Science 2026-03-20 Hesong Li , Ziqi Wu , Ruiwen Shao , Ying Fu

In this research work, we have demonstrated the application of Mask-RCNN (Regional Convolutional Neural Network), a deep-learning algorithm for computer vision and specifically object detection, to semiconductor defect inspection domain.…

Computer Vision and Pattern Recognition · Computer Science 2022-11-07 Bappaditya Dey , Enrique Dehaerne , Kasem Khalil , Sandip Halder , Philippe Leray , Magdy A. Bayoumi

Material properties strongly depend on the nature and concentration of defects. Characterizing these features may require nano- to atomic-scale resolution to establish structure-property relationships. 4D-STEM, a technique where diffraction…

Materials Science · Physics 2023-05-03 Stephanie M. Ribet , Colin Ophus , Roberto dos Reis , Vinayak P. Dravid

Four-dimensional scanning transmission electron microscopy (4D-STEM) provides rich, atomic-scale insights into materials structures. However, extracting specific physical properties - such as polarization directions essential for…

Scanning transmission electron microscopy (STEM) is an indispensable tool for atomic-resolution structural analysis for a wide range of materials. The conventional analysis of STEM images is an extensive hands-on process, which limits…

Advancements in fast electron detectors have enabled the statistically significant sampling of crystal structures on the nanometre scale by means of Scanning Electron Nanobeam Diffraction (SEND). Characterisation of structural similarity…

Materials Science · Physics 2022-07-28 Andy Bridger , William I. F. David , Thomas J. Wood , Mohsen Danaie , Keith T. Butler

Accurate grain orientation mapping is essential for understanding and optimizing the performance of polycrystalline materials, particularly in energy-related applications. Lithium nickel oxide (LiNiO$_{2}$) is a promising cathode material…

Disordered Systems and Neural Networks · Physics 2025-11-26 Sebastian Wissel , Jonas Scheunert , Aaron Dextre , Shamail Ahmed , Andreas Bayer , Kerstin Volz , Bai-Xiang Xu

We demonstrate a multi-beam scanning transmission electron microscopy (STEM) imaging that integrates down-sampling with super-resolution image reconstruction via a compressive sensing framework. A custom condenser aperture with six randomly…

Instrumentation and Detectors · Physics 2026-03-19 Akira Yasuhara , Takumi Sannomiya , Ryoichi Horisaki

Hematoxylin and Eosin (H&E) staining is a cornerstone of pathological analysis, offering reliable visualization of cellular morphology and tissue architecture for cancer diagnosis, subtyping, and grading. Immunohistochemistry (IHC) staining…

Image and Video Processing · Electrical Eng. & Systems 2025-06-23 Amit Das , Naofumi Tomita , Kyle J. Syme , Weijie Ma , Paige O'Connor , Kristin N. Corbett , Bing Ren , Xiaoying Liu , Saeed Hassanpour

Scanning electron microscopy (SEM) has been widely utilized in the field of materials science due to its significant advantages, such as large depth of field, wide field of view, and excellent stereoscopic imaging. However, at high…

Scanning Transmission Electron Microscopy (STEM) has become the main stay for materials characterization on atomic level, with applications ranging from visualization of localized and extended defects to mapping order parameter fields. In…

Instrumentation and Detectors · Physics 2019-01-15 Xin Li , Ondrej Dyck , Sergei V. Kalinin , Stephen Jesse

Linear phase-contrast scanning transmission electron microscopy (STEM) techniques compatible with high-throughput 4D-STEM acquisition are widely used to enhance phase contrast in weakly scattering and beam-sensitive materials. In these…