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For high-performance superconducting quantum devices based on Josephson junctions (JJs) decreasing lateral sizes is of great importance. Fabrication of sub-\mu m JJs is challenging due to non-flat surfaces with step heights of up to several…
Recent improvements in materials growth and fabrication techniques may finally allow for superconducting semiconductors to realize their potential. Here we build on a recent proposal to construct superconducting devices such as wires,…
Josephson tunnel junctions form the basis for various superconducting electronic devices. For this reason, enormous efforts are routinely taken to establish and later on maintain a scalable and reproducible wafer-scale manufacturing process…
In recent years, quantum computing has promised a revolution in computing performance, based on massive parallelism enabled by many entangled qubits. Josephson junction integrated circuits have emerged as the key technology to implement…
Modern Superconducting QUantum Interference Devices (SQUIDs) are commonly fabricated from either Al or Nb electrodes, with an in-situ oxidation process to create a weak link between them. However, common problems of such planar nano- and…
Josephson Junctions are important components in superconducting qubits. It introduces anharmonicity to the energy level spacings of the qubit which allow us to identify two unique quantum energy states for computing. It is difficult to…
Scalability in the fabrication and operation of quantum computers is key to move beyond the NISQ era. So far, superconducting transmon qubits based on aluminum Josephson tunnel junctions have demonstrated the most advanced results, though…
Quantum processing units (QPUs) based on superconducting Josephson junctions promise significant advances in quantum computing. However, they face critical challenges. Decoherence, scalability limitations, and error correction overhead…
Recently, gate-defined Josephson junctions based on magic-angle twisted bilayer graphene (MATBG) have been fabricated. In such a junction, local electrostatic gating can create two superconducting regions connected by an interaction-driven…
We present our new fabrication Process for Superconductor Electronics (PSE2) that integrates two (2) layers of Josephson junctions in a fully planarized multilayer process on 200-mm wafers. The two junction layers can be, e.g., conventional…
Superconducting circuits are exceptionally flexible, enabling many different devices from sensors to quantum computers. Separately, epitaxial semiconductor devices such as spin qubits in silicon offer more limited device variation but…
Mesoscopic multi-terminal Josephson junctions are novel devices that provide weak coupling between several bulk superconductors through a common normal layer. Because of the nonlocal coupling of the superconducting banks, a current flow…
Unconventional superconductors exhibit an order parameter symmetry lower than the symmetry of the underlying crystal lattice. Recent phase sensitive experiments on YBCO single crystals have established the d-wave nature of the cuprate…
Low-capacitance Josephson junctions, where Cooper pairs tunnel coherently while Coulomb blockade effects allow the control of the total charge, provide physical realizations of quantum bits (qubits), with logical states differing by one…
Establishment of phase-coherence and a non-dissipative (super)current between two weakly coupled superconductors, known as the Josephson effect, plays a foundational role in basic physics and applications to metrology, precision sensing,…
We present a method for fabricating Josephson junctions and superconducting quantum interference devices (SQUIDs) which is based on the local anodization of niobium strip lines 3 to 6.5 nm-thick under the voltage-biased tip of an Atomic…
The narrow bandgap of semiconductors allows for thick, uniform Josephson junction barriers, potentially enabling reproducible, stable, and compact superconducting qubits. We study vertically stacked van der Waals Josephson junctions with…
The combination of an ordinary s-type superconductor with three-dimensional topological insulators creates a promising platform for fault-tolerant topological quantum computing circuits based on Majorana braiding. The backbone of the…
The non-dissipative non-linearity of a Josephson junction converts macroscopic superconducting circuits into artificial atoms, enabling some of the best controlled quantum bits (qubits) today. Three fundamental types of superconducting…
We present a structure and a fabrication method for superconducting tunnel junctions down to the dimensions of 200 nm using i-line UV lithography. The key element is a side-wall-passivating spacer structure (SWAPS) which is shaped for…